Molecular Dynamics Simulation of Chemical Sputtering

We study chemical sputtering by D and D$_{2}(\upsilon )$ at deuterated amorphous carbon surface. The dynamics of the surface characteristics is a function of the initial surface and the cumulative effect of the projectiles. We study evolution of the spectrum of the sputtered particles, hydrocarbons, in search for the steady ``state'' sputtering yield. The comparison of the steady yields of atoms vs. molecular projectiles in various vibrationally excited states enables interpretation of the ORNL experimental results.