GEC Session: Nanoplasmas

Presentations

• Experimental investigations of reactions in plasma etching of nanometer size structures

  COFFEE_KLATCH · Invited

  June 6, 2007, 1:30 PM – June 6, 2007, 2:06 PM

  Authors

  • Vincent Donnelly

    University of Houston

  View abstract →

• Plasma-particle interactions and their role in nanocyrstal formation in plasmas

  COFFEE_KLATCH · Invited

  June 6, 2007, 2:06 PM – June 6, 2007, 2:42 PM

  Authors

  • Uwe Kortshagen

    University of Minnesota

  View abstract →

• Plasma Etching of Nano-Scale Features

  COFFEE_KLATCH · Invited

  June 6, 2007, 2:42 PM – June 6, 2007, 3:18 PM

  Authors

  • Ying Zhang

    IBM T. J. Watson Research Center, Yorktown Heights, NY 10598, USA

  View abstract →

• Nanoscale Challenges in Plasma-Surface Interactions

  COFFEE_KLATCH · Invited

  June 6, 2007, 3:18 PM – June 6, 2007, 3:54 PM

  Authors

  • David Graves

    University of California at Berkeley

  View abstract →