Measurements of Electron Temperature and Density, in an AC Pulsed Oxygen Plasma Discharge

Emission and analytical spectroscopy was applied to investigate O$_{2}$ plasma, which was generated by an AC discharge between 0.15 and 0.5 Torr pressure. For the diagnostic study, a double Langmuir probe was employed. The derivation of plasma parameters is based on a theoretical description of the double-probe current-voltage characterization in the Thick Sheath Limit (TSL) region [1]. Electron temperature of $T_{e}$ = 1.09 eV and an ion density of $n_{i}$= 2.08 x 10$^{10}$ cm$^{-3}$ were evaluated at 2 Torr. We present electron temperature and ion density as a function of the pressure at 3 different power discharge levels. Also we present emission spectroscopy in the wavelength range of 200-1100 nm as a function of the pressure. \newline \newline [1] J.D. Swift and J. R. Schwar, Electric Probes for Plasma Diagnostics (New York: Elsevier) 1971.