Dependence of the chemical sputtering of deuterated carbon on the surface temperature

We study chemical sputtering of carbon irradiated by 1-30 eV deuterium atoms, in range of surface temperatures 300-1000 K. At each temperature and each impact deuterium energy a quasi-stationarity of the total carbon erosion is reached by cumulative bombardment. Dependence of the mass, energy and angular spectra of sputtered hydrocarbons, as well as density of the sp$^{3}$ and sp$^{2}$ moieties on the surface temperature are also studied. We compare our results with available experimental data on methane, acetylene and the total carbon sputtering.