Data-driven predictive science for low-temperature plasmas

LANL, Sandia, UCLA, University of Michigan, West Virginia University, Lam Research Corporation, and collaborators propose to form a new center for predictive science of low-temperature plasmas. The center’s mission is to demonstrate capabilities to predict and control plasma kinetics in eV low-temperature regime such as in semiconducting processing plasmas. The center is founded on the emerging ‘fourth paradigm’ for scientific discovery and technology development, which uses rapidly advancing big data technologies and methods. The generation, processing, and applications of large experimental and simulation data sets coherently link interdisciplinary center expertise in experiments, plasma theory \& simulations, and statistical methods \& machine learning, culminating in predictions and controls. The new and potentially revolutionary diagnostics and sensors include Micro Electro and Mechanical Sensor probes, microparticle cloud imaging, nanoprobes enabled by nanocrystal and quantum dots. Existing experiments will be leveraged.