Procedures for Monitoring Air Quality in Clean Rooms

As part of the development of new laboratory activities related to semiconductor manufacturing and clean rooms, standard operating procedures were developed for monitoring the following properties: (1) relative humidity using a sling psychrometer, (2) flow rate of HVAC systems using a pitot tube with an air velocity meter(Dwyer) and Magnehelic manometer, (3) air changes per hour based on particulate concentration using a Temtop Air Quality Detector, and (4) the particle count of air in the room using a Teledyne PM Mass Monitor T640.