Electromagnetic Particle-In-Cell and Monte-Carlo Modeling Of Radio-FrequencyCapacitively Coupled Argon Plasma

A low-pressure Argon discharge is modeled using the particle-in-cell algorithm in conjunction with Monte Carlo simulations for the collision process of particles (PIC/MCC). This approach is commonly employed in the study of capacitively coupled plasma (CCP) systems, which is one of the most prevalent types of industrial plasma sources. In the present poster, I will present a MATLAB simulation of the algorithm eduPIC by Danko and colleagues. Some of the results are for single-frequency and dual-frequency CCPs for Argon plasma. The simulations demonstrate a range of kinetic effects, and the results are in excellent agreement with various experimentally measured data, such as electron density, electron temperature, and degree of dissociation. Furthermore, enhancements, such as the particle pusher Boris algorithm, are being implemented.