Formation of ion flux in low frequency and low pressure ccrf discharge

The formation of ion energy distribution function and ion angular distribution function are studied in 2-13.56 MHz discharge in Ar and BF3. The results are obtained with self-consistent kinetic simulations with using particle in cell Monte-Carlo collisions algorithm. For low gas pressure and high applied discharge voltages the models of electron and ion motion are modified to take into account the anisotropy of electron and ion scattering.