Numerical investigation on capacitively coupled chlorine discharge.

PIC methods using Monte Carlo collision have been extensively used for the study of chlorine plasma. In our study we introduce a self-consistent particle model for capacitively coupled chlorine discharge which considers motions and collisions of neutral species as well as of charged particles. Chlorine discharge is highly electro-negative which requires long discharge time for steady state where the negative ion population dominates over that of electrons. Multi-scale simulation technique is developed to simulate both plasma steady state and steady state of plasma to neutral gas dynamics. Precise structure of multi-scale simulation method and preliminary results will be shown.