Magnetically-Enhanced and Related Plasmas

Presentations

• Investigations of Magnetically Enhanced RIE Reactors with Rotating Magnetic Fields

  ORAL

  Oct. 14, 2008, 10:00 AM – Oct. 14, 2008, 10:15 AM

  Authors

  • Natalia Babaeva

    University of Michigan

  • Mark J. Kushner

    Iowa State University

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• ABSTRACT WITHDRAWN

  Oct. 14, 2008, 10:15 AM – Oct. 14, 2008, 10:30 AM

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• On the Plasma Parameters in the High Power Impulse Magnetron Sputtering Discharge (HiPIMS)

  COFFEE_KLATCH · Invited

  Oct. 14, 2008, 10:30 AM – Oct. 14, 2008, 11:00 AM

  Authors

  • Jon T. Gudmundsson

    University of Iceland

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• \textit{IPD} -The Use of Impulse Plasma in Surface Engineering

  ORAL

  Oct. 14, 2008, 11:00 AM – Oct. 14, 2008, 11:15 AM

  Authors

  • Krzysztof Zdunek

    Faculty of Mater. Sci., Warsaw University of Technology, Poland

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• Practical helicon sources using permanent magnets

  ORAL

  Oct. 14, 2008, 11:15 AM – Oct. 14, 2008, 11:30 AM

  Authors

  • Francis F. Chen

    UCLA

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• Time and space-resolved measurements of the neutral gas density in a helicon reactor by TALIF

  ORAL

  Oct. 14, 2008, 11:30 AM – Oct. 14, 2008, 11:45 AM

  Authors

  • Laurent Liard

    LPTP - CNRS UMR 7648

  • Ane Aanesland

    LPTP - CNRS UMR 7648

  • Jacques Jolly

    Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique, Palaiseau 91128, France, LPTP - CNRS UMR 7648

  • Jean-Luc Raimbault

    LPTP, Ecole Polytechnique, LPTP - CNRS UMR 7648

  • Pascal Chabert

    LPTP, Ecole Polytechnique, France, LPTP, Ecole Polytechnique, LPTP - CNRS UMR 7648, CNRS-Ecole Polytechnique, France

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