Real-time measurement of electron temperatures and ion densities using self-bias effect in argon inductively coupled plasma

AC bias voltage was applied through a DC blocking capacitor between a probe and a signal generator. Self-bias potentials were changed with the amplitude of AC bias voltage, electron temperatures and ion densities. The electron temperature and ion density were measured from the variations of the self-bias potentials at various RF powers (100-500W) and pressures (5-50mTorr). The experimental results were in good agreement with those from Langmuir probes.