Total and Total ionization Cross sections for Germanium hydrides GeH$_{x}$ (x=1-4) on electron impact from 0.1 eV to 5 keV

Germanium hydrides, in particular germane, GeH4, are widely used as feed gases in plasma deposition and doping processes in the semiconductor industries. In this paper we report electron impact total cross sections from 0.1 eV to 5 keV for GeH$_{x}$ (x=1-4). We employed R-matrix method using Quantemol N[1] till 15 eV and spherical complex optical potential formalism (SCOP) [2-3] beyond 15 eV. We also report total ionization cross sections using our Complex Scattering Potential -- ionization contribution (CSP-ic) [2,3] for these targets. \textbf{Ref.} [1] J.Tennyson, D.B. Brown, J.Munro I.Rozum, H.Varambhia, N.Vinci Journal of Physics: Conference Series \textbf{86 }(2007) 012001 [2] M. Vinodkumar, C. Limbachiya, K.N. Joshipura, K. Korot, Eur. J. Phys. D. (2008) DOI: 10.1140/epjd/e2008-00106-3 [3] M. Vinodkumar, C. Limbachiya, K.N.Joshipura, K. Korot, Nigel Mason Int. J. Mass Spectrom 273 (2008) 145.