Plasma Diagnostics II

Presentations

• Origin of electrical changes at plasma etching endpoints

  ORAL

  Oct. 17, 2008, 10:00 AM – Oct. 17, 2008, 10:15 AM

  Authors

  • Mark Sobolewski

    National Institute of Standards and Technology

  • David Lahr

    National Institute of Standards and Technology

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• Photon-assisted Beam Probes for Low Temperature Plasmas

  ORAL

  Oct. 17, 2008, 10:15 AM – Oct. 17, 2008, 10:30 AM

  Authors

  • Alvaro Garcia de Gorordo

    The University of Texas at Austin

  • Gary A. Hallock

    The University of Texas at Austin

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• Negative Ion Densities and EEDFs in BCl$_{3}$/N$_{2}$ and BCl$_{3}$/SF$_{6}$ CCP Plasmas

  ORAL

  Oct. 17, 2008, 10:30 AM – Oct. 17, 2008, 10:45 AM

  Authors

  • Bogdan Pathak

    Plasma Research Laboratory, University of Kansas

  • John Alexander

    Plasma Research Laboratory, University of Kansas

  • K. Nordheden

    Plasma Research Laboratory, University of Kansas, The University of Kansas

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• Application of an RF Biased Langmuir Probe to Etch Reactor Chamber Matching, Fault Detection and Process Control

  ORAL

  Oct. 17, 2008, 10:45 AM – Oct. 17, 2008, 11:00 AM

  Authors

  • Douglas Keil

    Lam Research Corporation

  • Jean-Paul Booth

    Lam Research Corporation

  • Neil Benjamin

    Lam Research Corporation

  • Chris Thorgrimsson

    Lam Research Corporation

  • Mitchell Brooks

    Lam Research Corporation

  • Mikio Nagai

    Lam Research Corporation

  • Luc Albarede

    Lam Research Corporation

  • Jung Kim

    Lam Research Corporation

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• Simultaneous determination of electron density and electron temperature in low-pressure plasmas using the Multipole Resonance Probe

  ORAL

  Oct. 17, 2008, 11:00 AM – Oct. 17, 2008, 11:15 AM

  Authors

  • Martin Lapke

    Ruhr University Bochum

  • Thomas Mussenbrock

    Ruhr University Bochum

  • Ralf Peter Brinkmann

    Ruhr University Bochum, Ruhr-Universitaet Bochum, Germany, Ruhr University Bochum, D44780 Bochum, Germany, Ruhr-University Bochum, Germany, Theoretical Electrical Engineering, Ruhr-Universit\"at-Bochum, D-44780 Bochum, Germany

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• A direct measurement of the energy flux density in plasma surface interaction

  ORAL

  Oct. 17, 2008, 11:15 AM – Oct. 17, 2008, 11:30 AM

  Authors

  • Remi Dussart

    GREMI

  • Anne-Lise Thomann

    GREMI

  • Nadjib Semmar

    GREMI

  • Laurianne Pichon

    GREMI

  • Larbi Bedra

    GREMI

  • Jacky Mathias

    GREMI

  • Yves Tessier

    GREMI

  • Philippe Lefaucheux

    GREMI

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• Development of a compact, high energy electron beam source

  ORAL

  Oct. 17, 2008, 11:30 AM – Oct. 17, 2008, 11:45 AM

  Authors

  • Scott Walton

    Naval Research Laboratory

  • R.F. Fernsler

    Naval Research Laboratory

  • Robert Meger

    Naval Research Laboratory

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• ABSTRACT WITHDRAWN

  Oct. 17, 2008, 11:45 AM – Oct. 17, 2008, 12:00 PM

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