Capacitively-Coupled Plasmas

Presentations

• Nonlinear Effects on Heating in Capacitive Discharges

  COFFEE_KLATCH · Invited

  Oct. 17, 2008, 1:30 PM – Oct. 17, 2008, 2:00 PM

  Authors

  • Thomas Mussenbrock

    Ruhr University Bochum

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• The RF Sheath, Nonlinearity and Stochastic heating: An extended analytical approach

  ORAL

  Oct. 17, 2008, 2:00 PM – Oct. 17, 2008, 2:15 PM

  Authors

  • Michael Klick

    Plasmetrex GmbH, Plasmetrex GmbH, D12489 Berlin, Germany

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• Effects of Magnetic Field on Very High Frequency Capacitively Coupled Plasma

  ORAL

  Oct. 17, 2008, 2:15 PM – Oct. 17, 2008, 2:30 PM

  Authors

  • Kallol Bera

    Applied Materials, Inc., Sunnyvale, CA

  • Shahid Rauf

    Applied Materials, Inc., Sunnyvale, CA

  • Ken Collins

    Applied Materials, Inc., Sunnyvale, CA

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• Resonance heating of dual frequency capacitive discharges

  ORAL

  Oct. 17, 2008, 2:30 PM – Oct. 17, 2008, 2:45 PM

  Authors

  • Dennis Ziegler

    Ruhr University Bochum

  • Thomas Mussenbrock

    Ruhr University Bochum, Ruhr University Bochum, D44780 Bochum, Germany

  • Ralf Peter Brinkmann

    Ruhr University Bochum, Ruhr-Universitaet Bochum, Germany, Ruhr University Bochum, D44780 Bochum, Germany, Ruhr-University Bochum, Germany, Theoretical Electrical Engineering, Ruhr-Universit\"at-Bochum, D-44780 Bochum, Germany

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• Electrode Impedance Effect on Electron Density in a CCP Reactor

  ORAL

  Oct. 17, 2008, 2:45 PM – Oct. 17, 2008, 3:00 PM

  Authors

  • Yohei Yamazawa

    Tokyo Electron AT LTD.

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• Characteristics of Pulsed Capacitively Coupled Plasma Sources for Plasma Etching

  ORAL

  Oct. 17, 2008, 3:00 PM – Oct. 17, 2008, 3:15 PM

  Authors

  • Ankur Agarwal

    Applied Materials, Inc.

  • Phillip Stout

    Applied Materials, Inc.

  • Shahid Rauf

    Applied Materials, Inc.

  • Ken Collins

    Applied Materials, Inc.

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• A Parallelized 3D Particle-In-Cell Method With Magnetostatic Field Solver And Its Applications

  ORAL

  Oct. 17, 2008, 3:15 PM – Oct. 17, 2008, 3:30 PM

  Authors

  • Kuo-Hsien Hsu

    National Space Organization, Taiwan

  • Yen-Sen Chen

    National Space Organization, Taiwan

  • Men-Zan Bill Wu

  • Jong-Shinn Wu

    National Chiao-Tung University, Taiwan

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