Nano-block manipulation in CVD plasmas

We have proposed a novel nano-system construction method using plasmas [1-3]. We have succeeded in realizing size control of nano-blocks and their rapid transport towards a substrate by using pulse discharges with amplitude modulation (AM) of the discharge voltage [1- 3]. We are developing a method for their three dimensional transport using a capacitively coupled RF discharge reactor having a grounded electrode with needles. During the period of AM nano-blocks are transported from their generated region rear the powered electrode to the top of the needle. Such three dimensional transport needs an asymmetric electric potential profile, in other words, a large voltage drop across the sheath near the powered electrode. We will report the experimental results and discuss the mechanism of the three dimensional transport.\\[4pt] [1] S. Nunomura, et al. J. Appl. Phys., 99, 083302 (2006).\\[0pt] [2] K. Koga, et al. J. Phys. D, 40, 2267 (2007).\\[0pt] [3] M. Shiratani, et al. Faraday Discuss., 138, 127 (2008).