FTIR Analysis of Process Effluent Generated From Tissue Removed By Plasma-Chemical Process

We present analysis of the effluent produced during a tissue removal proccess driven by a RF excited plasma which generates chemical species. We collected and analyzed the process by-product gas, small particles trapped by fine-pore filtration, and the post-process tissue surface using FTIR absorption and ATR-FTIR. From these data we make initial estimates for the kinetic pathways that are accessed by the plasma-based tissue removal process.