Poster Session I (11:00-12:30)

POSTER · CTP

Presentations

  • Properties of inductively coupled rf CH$_4$/H$_2$ discharges

    POSTER

    Authors

    • Takashi Kimura

      Nagoya Institute of Technology

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Dynamics of unstable Ar/Cl$_{2}$ inductive discharges

    POSTER

    Authors

    • Emilie Despiau-Pujo

      LPP - CNRS/Ecole Polytechnique

    • Pascal Chabert

      Laboratoire de Physique des Plasmas - CNRS, Laboratoire de Physique des Plasmas, LPP, LPP, CNRS - Ecole Polytechnique, Laboratoire de Physique des Plasmas, CNRS-Ecole Polytechnique, Palaiseau, France, LPP - CNRS/Ecole Polytechnique

    • Allan J. Lichtenberg

      UC Berkeley

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  • E-H heating mode transition in high-pressure helium inductively coupled plasma

    POSTER

    Authors

    • Hyo-Chang Lee

      Hanyang University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Chin-Wook Chung

      Hanyang University, Hanyang Univ. Seoul, South Korea, Department of Electrical Engineering, Hanyang University,17 Heangdang-dong, Seongdong-ku, Seoul 133-791, Republic of Korea, Hanyang University, Seoul, South Korea, HanYang University

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  • Effect of flow rate on the plasma parameters and electron energy distribution in plasma process reactor

    POSTER

    Authors

    • Hyo-Chang Lee

      Hanyang University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Chin-Wook Chung

      Hanyang University, Hanyang Univ. Seoul, South Korea, Department of Electrical Engineering, Hanyang University,17 Heangdang-dong, Seongdong-ku, Seoul 133-791, Republic of Korea, Hanyang University, Seoul, South Korea, HanYang University

    View abstract →

  • Instabilities in an Inductive Coupled Plasma Source With Magnetic Confinement

    POSTER

    Authors

    • Jaime Arancibia Monreal

      Laboratoire de Physique des Plasmas, CNRS-Ecole Polytechnique, Palaiseau, France

    • Pascal Chabert

      Laboratoire de Physique des Plasmas - CNRS, Laboratoire de Physique des Plasmas, LPP, LPP, CNRS - Ecole Polytechnique, Laboratoire de Physique des Plasmas, CNRS-Ecole Polytechnique, Palaiseau, France, LPP - CNRS/Ecole Polytechnique

    • Valery Godyak

      RF Plasma Consulting, Brookline USA, RF Plasma Consulting, Brookline, RF Plasma Consulting, Massachussetts, USA, RF PLasma Consulting

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  • Energy Flux onto a Substrate during ICP Assisted Sputter-Deposition

    POSTER

    Authors

    • Yoshinobu Matsuda

      Nagasaki University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Electron densities and temperatures in a Cl$_{2}$/Ar ICP

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Jean-Paul Booth

      LPP-CNRS

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Experimental measurement of the plasma parameters in Ar/SF$_{6}$ inductively coupled plasma

    POSTER

    Authors

    • Seung-Ju Oh

      HanYang University, Hanyang University

    • Hyo-Chang Lee

      Hanyang University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Chin-Wook Chung

      Hanyang University, Hanyang Univ. Seoul, South Korea, Department of Electrical Engineering, Hanyang University,17 Heangdang-dong, Seongdong-ku, Seoul 133-791, Republic of Korea, Hanyang University, Seoul, South Korea, HanYang University

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  • PIC simulations of low pressure plasmas using graphics processing units

    POSTER

    Authors

    • P. Mertmann

      AEPT, Ruhr-Universitaet Bochum, Ruhr-University Bochum, AEPT, Ruhr University Bochum, Ruhr-University Bochum, GER

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Simulation of a PIII reactor with a magnetized remote source

    POSTER

    Authors

    • Mathieu Maury

      LIMHP-CNRS (UPR1311)

    • Khaled Hassouni

      CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France, LIMHP CNRS, LIMHP-CNRS (UPR1311)

    • Armelle Michau

      CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France, LIMHP CNRS, LIMHP-CNRS (UPR1311)

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  • Study of reactive hydrocarbon radicals in microwave plasma CVD for synthesis of single crystal diamond

    POSTER

    Authors

    • Hideaki Yamada

      Diamond Research Lab., AIST, Japan

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Global model of low-pressure Cl$_{2}$/Ar inductively coupled plasma

    POSTER

    Authors

    • Romain Chanson

      CNRS Institut des Materiaux Jean Rouxel

    • Nicolas Vaissi\`ere

      Institut des Materiaux Jean Rouxel

    • Ahmed Rhallabi

      Institut des Materiaux Jean Rouxel

    • Christophe Cardinaud

      CNRS Institut des Materiaux Jean Rouxel

    • Marie Claude Peignon

      CNRS Institut des Materiaux Jean Rouxel

    • Sophie Bouchoule

      CNRS Laboratoir de Photoniques et de Nanostructures

    View abstract →

  • Modeling of the Advanced Plasma Source

    POSTER

    Authors

    • Benjamin Schroeder

      Ruhr-Universitaet Bochum

    • Ralf Peter Brinkmann

      Ruhr University Bochum, Department of Electrical Engineering and Information Sciences, Ruhr-University Bochum, Germany, Theoretical Electrical Engineering, Ruhr-University Bochum, Ruhr-University Bochum, Ruhr-Universitaet Bochum

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  • Discharge characteristics of plasma display panel containing traces of impurity gas

    POSTER

    Authors

    • Yoshikuni Hirano

      NHK Science and Technology Research Laboratories

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Particle Simulations of Sheath dynamics in Low Pressure Capacitively Coupled Argon Plasma Discharges

    POSTER

    Authors

    • Yoshinori Takao

      Department of Aeronautics and Astronautics, Kyoto University, Japan

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • A new versatile approximation method for the line radiation description

    POSTER

    Authors

    • Sergey Gorchakov$^1$

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    View abstract →

  • Modeling of the Ion Induced Secondary Electron Emission in RF PLASMAS with the PIC/MCC Method

    POSTER

    Authors

    • Zoran Petrovic

      Institute of Physics, University of Belgrade, P.O.Box 68, 11080 Zemun, Belgrade, Serbia, Institute of Physics Belgrade, Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Zemun, Belgrade, Serbia, Institute of Physics Belgrade Serbia, Institute of Physics POB 68 11080 Zemun Serbia

    • Aleksandar Bojarov

      Institute of Physics POB 68 11080 Zemun Serbia

    • Marija Radmilovic-Radjenovic

      Institute of Physics, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Institute of Physics POB 68 11080 Zemun Serbia

    View abstract →

  • PIC/MC simulation of electron current to spherical probe

    POSTER

    Authors

    • David Trunec

      Masaryk University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Modeling of the negative ion source for the ITER neutral beam heating system

    POSTER

    Authors

    • Nicolas Kohen

      LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Brownian motion of particle in a gas with non-equilibrium distribution function

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    Authors

    • Sergey Maiorov

      General Physics Institute of RAS, Moscow, A.M. Prokhorov General Physics Institute of the Russian Academy of Sciences, Moscow, A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow

    • Alexander Ignatov

      A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow

    • Sergey Trigger

      Joint Institute for High Temperatures, Russian Academy of Sciences, Moscow

    • Piter Schram

      Eindhoven University of Technology, Eindhoven

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  • Dusty Plasmas of Gas Mixtures

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    Authors

    • Sergey Maiorov

      General Physics Institute of RAS, Moscow, A.M. Prokhorov General Physics Institute of the Russian Academy of Sciences, Moscow, A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow

    • Sergey Antipov

      Joint Institute for High Temperatures of the Russian Academy of Sciences, Moscow

    • Michail Vasiliev

      Joint Institute for High Temperatures of the Russian Academy of Sciences, Moscow

    • Oleg Petrov

      Joint Institute for High Temperatures of the Russian Academy of Sciences, Moscow

    • Vladimir Fortov

      Joint Institute for High Temperatures of the Russian Academy of Sciences, Moscow

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  • A parametric study of the stratification of electronegative plasmas and the formation of ion-ion plasmas due to magnetic filtering

    POSTER

    Authors

    • Quentin Delivre

      LPP, CNRS - Ecole Polytechnique

    • Ane Aanesland

      CNRS-Ecole Polytechnique, LPP, CNRS - Ecole Polytechnique

    • Pascal Chabert

      Laboratoire de Physique des Plasmas - CNRS, Laboratoire de Physique des Plasmas, LPP, LPP, CNRS - Ecole Polytechnique, Laboratoire de Physique des Plasmas, CNRS-Ecole Polytechnique, Palaiseau, France, LPP - CNRS/Ecole Polytechnique

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  • Void Closure of Dust Cloud by Modulated-13.56 MHz RF in PK-3 plus Complex Plasmas on the International Space Station

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    Authors

    • Kazuo Takahashi

      Kyoto Institute of Tecnology, Kyoto Institute of Technology

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Dust Formation in a DC discharge

    POSTER

    Authors

    • Armelle Michau

      CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France, LIMHP CNRS, LIMHP-CNRS (UPR1311)

    • Guillaume Lombardi

      CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France, LIMHP CNRS

    • C\'ecile Arnas

      PIIM CNRS

    • Xavier Bonnin

      CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France, LIMHP CNRS

    • Khaled Hassouni

      CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France, LIMHP CNRS, LIMHP-CNRS (UPR1311)

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  • On the hydrocarbon kinetics in dust producing symmetrically driven rf plasmas

    POSTER

    Authors

    • Juergen Roepcke

      INP-Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, INP Greifswald, Germany

    • Dmitry Lopatik

      INP Greifswald, Germany

    • Brankica Sikimic

      Inst. of Exp. Physics II, Ruhr-Univ. Bochum, Bochum, Germany

    • Frank Hempel

      INP Greifswald

    • Mark Boeke

      Ruhr-Universit\"at Bochum, Germany, Ruhr-University Bochum, Institute for Experimental Physics II, Germany, Inst. of Exp. Physics II, Ruhr-Univ. Bochum, Bochum, Germany

    • Ilija Stefanovic

      Ruhr-Universitaet, Bochum, Germany, Ruhr-Universit\"at Bochum, Germany, Inst. of Exp. Physics II, Ruhr-Univ. Bochum, Bochum, Germany

    • Nader Sadeghi

      Universite Grenoble \& CNRS, France, Lab. de Spectr. Physique, Universit\'e J. Fourier \& CNRS, Grenoble, France

    • Joerg Winter

      Ruhr-Universitaet, Bochum, Germany, Ruhr-Universit\"at Bochum, Germany, Institute for Experimental Physics II: Applied Plasma Physics, Ruhr-Universit\"at Bochum, 44780 Bochum, Germany, Ruhr-University Bochum, Institute for Experimental Physics II, Germany, Inst. of Exp. Physics II, Ruhr-Univ. Bochum, Bochum, Germany

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  • Dust particles charge experimental evaluation in laser induced high pressure colloid plasma flows

    POSTER

    Authors

    • E. Yu. Loktionov

      Bauman Moscow State Technical University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Investigation of Negative Ion Production in an Ar/CF4 Matrix-ECR Plasma Source with Transversal Magnetic Filter

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Eugen Stamate

      Technical University of Denmark, Risoe DTU, Technical University of Denmark

    View abstract →

  • Dust charge and potential in a two ion temperature dusty plasma

    POSTER

    Authors

    • Davoud Dorranian

      Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    View abstract →

  • Dust growth in PK-4

    ORAL

    Authors

    • L. Woerner

      MPE, Garching / GREMI, Orleans, GREMI, Orleans, France / MPE, Garching, Germany

    • G. Wattieaux

      GREMI, Orleans, France

    • E. Kovacevic

      GREMI, Orleans, France

    • J. Berndt

      GREMI, Orleans, France

    • M. Mikikian

      GREMI, Orleans, France

    • S. Albrecht

      MPE, Garching, Germany

    • M.H. Thoma

      MPE, Garching, Germany

    • Gregor Morfill

      MPE, Garching, MPE, Garching, Germany, Max Planck Institute for Extraterrestrial Physics

    • L. Boufendi

      GREMI, UMR6606, CNRS/Universite d'Orleans, 14 rue d'Issoudun, BP6744, 45067 Orleans Cedex 2, France, GREMI, University of Orleans, France, GREMI, CNRS-Universite d'Orleans, GREMI, Orleans University, GREMI, Orleans, France

    View abstract →

  • Synthesis of water ice particles in a rf plasma chamber with the cooled electrodes

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Application of short, cold cathode dc discharges as gas analytical sensors

    POSTER

    Authors

    • Vladimir Demidov

      West Virginia University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Soft x-ray radiography based on X-pinch powered by portable pulse generator

    ORAL

    Authors

    • Stanislav Chaikovsky

      Institute of High Current Electronics SB RAS, Tomsk, Institute of High Current Electronics SB RAS, Tomsk, Russia

    • Anton Artyomov

      Institute of High Current Electronics SB RAS, Tomsk, Russia

    • Anatoly Fedunin

      Institute of High Current Electronics SB RAS, Tomsk, Russia

    • Vladimir Feduschak

      Institute of High Current Electronics SB RAS, Tomsk, Russia

    • Natalia Labetskaya

      Institute of High Current Electronics SB RAS, Tomsk, Russia

    • Vladimir Oreshkin

      Institute of High Current Electronics SB RAS, Tomsk, Russia

    • Nikolay Ratakhin

      Institute of High Current Electronics SB RAS, Tomsk, Russia

    • Alexander Rousskikh

      Institute of High Current Electronics SB RAS, Tomsk, Russia

    • Alexander Zhigalin

      Institute of High Current Electronics SB RAS, Tomsk, Russia

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  • UV LED absorption spectroscopy for pulsed plasma diagnostics

    ORAL

    Authors

    • Paul Bodart

    • Gilles Cunge

      Laboratoire des Technologies de la Micro\'electronique, CNRS, LTM-CNRS, Grenoble, France, LTM-CNRS, CNRS/LTM

    • Nader Sadeghi

      LSP, Universit\'e Joseph Fourier and CNRS, LTM-CNRS, Univ. Grenoble \& CNRS, France, LSP, Univ. \& CNRS Grenoble, France, CNRS/LSP

    • Olivier Joubert

      Laboratoire des Technologies de la Micro\'electronique, CNRS, CNRS

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  • Space and time resolved density measurements in reactive plasmas with the plasma absorption probe

    ORAL

    Authors

    • Mark Boeke

      Ruhr-Universit\"at Bochum, Germany, Ruhr-University Bochum, Institute for Experimental Physics II, Germany, Inst. of Exp. Physics II, Ruhr-Univ. Bochum, Bochum, Germany

    • Carsten Selle

      Ruhr-University Bochum, Institute for Experimental Physics II, Germany

    • Joerg Winter

      Ruhr-Universitaet, Bochum, Germany, Ruhr-Universit\"at Bochum, Germany, Institute for Experimental Physics II: Applied Plasma Physics, Ruhr-Universit\"at Bochum, 44780 Bochum, Germany, Ruhr-University Bochum, Institute for Experimental Physics II, Germany, Inst. of Exp. Physics II, Ruhr-Univ. Bochum, Bochum, Germany

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  • Atomic Hydrogen Densities in Expanding Thermal Plasmas

    POSTER

    Authors

    • S. Welzel

      Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Measurement of Nitrogen Dissociation Degree of Nitrogen Discharge Plasma by Actinometry Method with Subtraction of First Positive Band Spectrum

    POSTER

    Authors

    • Hiroshi Akatsuka

      Tokyo Institute of Technology

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Atsushi Nezu

      Tokyo Institute of Technology

    • Haruaki Matsuura

      Tokyo Institute of Technology

    View abstract →

  • Design and Use of an Els\"{a}sser Probe for Projection of Alfv\'{e}n Wave Fields According to Wave Direction

    POSTER

    Authors

    • D.J. Drake

      University of Iowa

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • High resolution measurement of silicon wafer temperature using super-continuum light on optical low-coherence interferometry

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Spatial diagnostics of Hg/Ar and Hg/Xe discharge lamps by means of tomography

    POSTER

    Authors

    • Gita Revalde

      Institute of Atomic Physics and Spectroscopy

    • Natalia Denisova

      Institute of Theoretical and Applied Mechanics

    • Atis Skudra

      Institute of Atomic Physics and Spectroscopy

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Optical and electric probe diagnostics in low-pressure nitrogen-argon and oxygen-argon inductively coupled discharges

    POSTER

    Authors

    • Tae Hun Chung

      Dong-A University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Discharge dynamics of a micro-structured atmospheric pressure plasma channel

    POSTER

    Authors

    • Volker Schulz-von der Gathen

      Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Ruhr-Universitaet Bochum, Institute for Experimental Physics II: Applied Plasma Physics, Ruhr-Universit\"at Bochum, 44780 Bochum, Germany

    • Henrik Boettner

      Institute for Experimental Physics II: Applied Plasma Physics, Ruhr-Universit\"at Bochum, 44780 Bochum, Germany

    • Arthur Greb

      Institute for Experimental Physics II: Applied Plasma Physics, Ruhr-Universit\"at Bochum, 44780 Bochum, Germany

    • Joerg Winter

      Ruhr-Universitaet, Bochum, Germany, Ruhr-Universit\"at Bochum, Germany, Institute for Experimental Physics II: Applied Plasma Physics, Ruhr-Universit\"at Bochum, 44780 Bochum, Germany, Ruhr-University Bochum, Institute for Experimental Physics II, Germany, Inst. of Exp. Physics II, Ruhr-Univ. Bochum, Bochum, Germany

    • Eungsoo Kim

      Laboratory for Optical Physics and Engineering, Department of Electrical and Computer Engineering, University of Illinois, Urbana, IL 61801, USA

    • Sung-Jin Park

      Laboratory for Optical Physics and Engineering, Department of Electrical and Computer Engineering, University of Illinois, Urbana, IL 61801, USA

    • James Gary Eden

      Laboratory for Optical Physics and Engineering, Department of Electrical and Computer Engineering, University of Illinois, Urbana, IL 61801, USA

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  • Modeling and experimental study of molecular nitrogen dissociation in Ar -- N$_{2}$ ICP discharge

    POSTER

    Authors

    • Namjun Kang

      Universit\'e de Toulouse; UPS, INPT; LAPLACE (Laboratoire Plasma et Conversion d'Energie); 118 route de Narbonne, F-31062 Toulouse cedex 9, France

    • Freddy Gaboriau

      LAPLACE, Laplace, Toulouse, Universit\'e de Toulouse; UPS, INPT; LAPLACE (Laboratoire Plasma et Conversion d'Energie); 118 route de Narbonne, F-31062 Toulouse cedex 9, France

    • Andre Ricard

      Universit\'e de Toulouse; UPS, INPT; LAPLACE (Laboratoire Plasma et Conversion d'Energie); 118 route de Narbonne, F-31062 Toulouse cedex 9, France

    • Soo-ghee Oh

      Division of Energy System Research, Ajou University, Suwon 443-749 Korea

    View abstract →

  • In situ plasma process monitoring of BCl$_3$ using quantum cascade laser absorption spectroscopy

    POSTER

    Authors

    • Norbert Lang

      Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling

    POSTER

    Authors

    • Zdenek Navratil

      Masaryk University, Masaryk University, Brno

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    View abstract →

  • Expansion to Higher Mode in Electron Density Measurement by Microwave Resonator Probe

    POSTER

    Authors

    • Iji Liang

      Department of Electronics \& Information Engineering, Chubu University

    • Shu Ohta

      Department of Electronics \& Information Engineering, Chubu University

    • Kimitaka Kato

      Department of Electronics \& Information Engineering, Chubu University

    • Keiji Nakamura

      Chubu University, Department of Electronics \& Information Engineering, Chubu University

    • Hideo Sugai

      Chubu University, Department of Electronics \& Information Engineering, Chubu University

    View abstract →

  • Optical wave microphone measurement and analysis on pulsed laser irradiation to solid

    POSTER

    Authors

    • Fumiaki Mitsugi

      Kumamoto University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    View abstract →

  • Investigation by fast video imaging of the micro-discharges occurring during the PEO process

    ORAL

    Authors

    • Gerard Henrion

      Institut Jean Lamour - CNRS

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Comparison different optical emissions based measurements of electron densities

    POSTER

    Authors

    • Thomas Morgan

      Wesleyan University, Physics Department, Wesleyan University, Middletown, CT USA

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • QCLAS based in situ monitoring of low-k dielectric plasma etch processes

    ORAL

    Authors

    • Norbert Lang

      Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Observation of Negative Ions in VHF SiH$_{4}$/H$_{2}$ Plasma

    POSTER

    Authors

    • Yoshinobu Kawai

      Kyushu University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • The Effect of the Reflectance as a Si-Based Solar Cell Using the Nano-Imprint Lithography Processing

    POSTER

    Authors

    • Kyu-Ha Baek

      Electronics and Telecommunications Research Institute

    • Jong-Chang Woo

      Electronics and Telecommunications Research Institute

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Deposition rate enhancement of cluster-free P-doped a-Si:H films using multi-hollow discharge plasma CVD method

    POSTER

    Authors

    • Kenta Nakahara

      Kyushu University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Combinatorial deposition of microcrystalline Si films using multi-hollow discharge plasma CVD

    POSTER

    Authors

    • Takeaki Matsunaga

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    View abstract →

  • Atmospheric-Pressure Plasma Oxidation Process for Passivation of Si Surface

    POSTER

    Authors

    • Ze Teng Zhuo

      Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

    • Takayuki Ohnishi

      Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

    • Kazuma Goto

      Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

    • Yuta Sannomiya

      Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

    • Hiromasa Ohmi

      Department of Precision Science \& Technology, Osaka University, Osaka University, Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

    • Hiroaki Kakiuchi

      Osaka University, Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

    • Kiyoshi Yasutake

      Osaka University, Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

    View abstract →

  • The effect of substrate temperature on microstructure of nano-crystalline Si thin films deposited by ICP assisted magnetron sputtering at low temperature

    POSTER

    Authors

    • Kyung S. Shin

      Center for Advanced Plasma Surface Technology, Sungkyunkwan University, 300 Chunchun-dong, Jangan-gu, Suwon, 440-746, Republic of Korea

    • Yoon S. Choi

      Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Center for Advanced Plasma Surface Technology, Sungkyunkwan University, 300 Chunchun-dong, Jangan-gu, Suwon, 440-746, Republic of Korea

    • In S. Choi

      Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Center for Advanced Plasma Surface Technology, Sungkyunkwan University, 300 Chunchun-dong, Jangan-gu, Suwon, 440-746, Republic of Korea

    • Jeon G. Han

      Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Sungkyunkwan University, Center for Advanced Plasma Surface Technology, Sungkyunkwan University, 300 Chunchun-dong, Jangan-gu, Suwon, 440-746, Republic of Korea

    View abstract →

  • Generation of nitridated silicon particles and their thin film deposition using double multi-hollow discharges

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Stress-induced Diffusion of Nitrogen in Nitrided Stainless Steel

    POSTER

    Authors

    • Arvaidas Galdikas

      Kaunas University of Technology

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Microstructure and surface properties of silver by nitrogen ion implantation

    POSTER

    Authors

    • Amir H. Sari

      Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • A. Akhavan

      Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Phosphine Dopant Profile Control and Optimization Using Advanced Plasma Implantation

    POSTER

    Authors

    • Ludovic Godet

      Varian Semiconductor Equipment Associates, VSEA

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    View abstract →

  • Formation of Carbon Nitride by Direct Low Energy Nitrogen Ion Implantation into Graphite

    ORAL

    Authors

    • Amir H. Sari

      Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    View abstract →

  • Hydrophilic Treatment of Inner Surface of Polymer Tubes using Tubular Low-Pressure Plasma

    POSTER

    Authors

    • Seigo Takashima

      Plasma Center for Industrial Applications, Nagoya Urban Industries Promotion Corporation

    • Michiko Ito

      Plasma Center for Industrial Applications, Nagoya Urban Industries Promotion Corporation

    • Saburo Uchida

      Plasma Center for Industrial Applications, Nagoya Urban Industries Promotion Corporation

    • Takeshi Aoki

      Plasma Center for Industrial Applications, Nagoya Urban Industries Promotion Corporation

    • Michiyuki Kume

      Plasma Center for Industrial Applications, Nagoya Urban Industries Promotion Corporation

    View abstract →

  • Regeneration of inorganic sorbent surfaces using dielectric barrier discharge

    ORAL

    Authors

    • Paul Gravejat

      Universit\'e Lille-Nord-de-France F-59000, Lille, France

    • Frederic Thevenet

      Universit\'e Lille-Nord-de-France F-59000, Lille, France

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    View abstract →

  • Fabrication of nanostructured black metals by use of self-growing helium bubbles

    ORAL

    Authors

    • Shin Kajita

      Nagoya University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Effect of RF plasma treatment on the nonlinear refractive index and susceptibility of PVC film

    ORAL

    Authors

    • Davoud Dorranian

      Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Chemical Sputtering Yield as a Function of Ion Incident Angle in Wurtzite-Type GaN Crystal

    POSTER

    Authors

    • Kenji Harafuji

      Department of Electrical and Electronic Engineering, Ritsumeikan University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Design of a microwave low-temperature plasma reactor used for simulating plasma interactions with mixed materials targets

    POSTER

    Authors

    • Guillaume Lombardi

      CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France, LIMHP CNRS

    • Ligia Colina Delacqua

      CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France

    • Michael Redolfi

      CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France

    • Armelle Michau

      CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France, LIMHP CNRS, LIMHP-CNRS (UPR1311)

    • Xavier Bonnin

      CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France, LIMHP CNRS

    • Dominique Vrel

      CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France

    • Khaled Hassouni

      CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France, LIMHP CNRS, LIMHP-CNRS (UPR1311)

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  • Study of surface processes in N$_{2}$-O$_{2}$ plasmas

    POSTER

    Authors

    • Carlos D. Pintassilgo

      IPFN-Laboratorio Associado, IST, 1049-001 Lisboa, Portugal, IPFN - Laboratorio Associado, IST, Lisboa, Portugal

    • Vasco Guerra

      IPFN-LA, Instituto Superior Tecnico, 1049-001 Lisboa, Portugal, Instituto de Plasmas e Fusao Nuclear - Laboratorio Associado, Instituto Superior Tecnico, 1049-001 Lisboa, Portugal, Instituto de Plasmas e Fus\~ao Nuclear - Laboratorio Associado, Instituto Superior Tecnico, 1049-001 Lisboa, Portugal, IPFN - Laboratorio Associado, IST, Lisboa, Portugal

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  • Irradiation of High Energy Electrons onto GaN Thin Films and Observation of Induced Optical Luminescence in Inductively-Coupled Plasmas

    POSTER

    Authors

    • Keiji Nakamura

      Chubu University, Department of Electronics \& Information Engineering, Chubu University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Substrate temperature effects on amorphous carbon deposition process during acetylene plasma, investigated infrared spectroscopy

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Laser-plasma induced copper surface phenomena

    POSTER

    Authors

    • Davoud Dorranian

      Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Carbon dust particles generated due to H$_{2}$ plasma-carbon wall interaction

    POSTER

    Authors

    • Hiroshi Miyata

      Kyushu University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Effects of Photoemissions in UV and VUV Regions on Nano-Surface Strucures of Soft Materials during Plasma Processes

    POSTER

    Authors

    • Ken Cho

      Osaka University, Joining and Welding Research Institute, Osaka University, Osaka Univ.

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • \textit{in situ} Electron Spin Resonance Study for Plasma-Surface interactions

    POSTER

    Authors

    • Kenji Ishikawa

      Nagoya University

    • N. Sumi

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Surface Modification of Metals by HV Impulse Discharges in Air and Liquid

    POSTER

    Authors

    • Kanji Shibagaki

      Suzuka National College of Technology

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Development of Atmospheric Pressure Plasma Jet with Slit Nozzle for large area treatment

    POSTER

    Authors

    • Nobuaki Oshima

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Energy release of a nanosecond pulse corona discharge in atmospheric air-propane mixtures for ignition purposes

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    View abstract →

  • Plasma dynamics, pattern formation and streamer development during microwave breakdown

    POSTER

    Authors

    • Bhaskar Chaudhury

      LAPLACE (LAboratoire PLAsma et Conversion d Energie), CNRS and Universite de Toulouse, France

    • Guo-Qiang Zhu

      LAPLACE (LAboratoire PLAsma et Conversion d Energie), CNRS and Universite de Toulouse, France

    • Jean-Pierre Boeuf

      LAPLACE, CNRS and Universite Paul Sabatier, Toulouse, France, LAPLACE (LAboratoire PLAsma et Conversion d Energie), CNRS and Universite de Toulouse, France, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universit\'e de Toulouse, France

    View abstract →

  • Dielectric Barrier Discharge and a Microwave Cavity Discharge in Synchronous Operation

    POSTER

    Authors

    • Milka Nikolic

      Old Dominion University

    • Svetozar Popovic

      Old Dominion University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Leposava Vu\v{s}kovic

      Old Dominion University

    View abstract →

  • Study of a microwave plasma torch

    POSTER

    Authors

    • K. Gadonna

      LPGP, CNRS/UPS, Orsay, France

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Study of atmospheric pressure radiofrequency Ar/O$_{2}$ plasma afterglow used for PTFE surface modification

    POSTER

    Authors

    • Corinne Duluard

      Universit\'e Libre de Bruxelles, Facult\'e des Sciences, Chimie Analytique et Chimie des Interfaces

    • Thierry Dufour

      Universit\'e Libre de Bruxelles, Facult\'e des Sciences, Chimie Analytique et Chimie des Interfaces

    • Emile Carbone

      Universit\'e Libre de Bruxelles, Facult\'e des Sciences, Chimie Analytique et Chimie des Interfaces

    • Fran\c{c}ois Reniers

      Universit\'e Libre de Bruxelles, Facult\'e des Sciences, Chimie Analytique et Chimie des Interfaces

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  • Numerical analysis of fundamental properties in helium dc glow discharges at sub-atmospheric and atmospheric pressure

    POSTER

    Authors

    • Akinori Oda

      Graduate School of Engineering, Nagoya Institute of Technology

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Evidence for surface streamers self-synchronisation in N$_{2}$/O$_{2}$ mixtures

    POSTER

    Authors

    • Ilya Marinov

      LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France

    • Olivier Guaitella

      LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud-11, CNRS, Palaiseau, France

    • Antoine Rousseau

      Ecole Polytechnique, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud-11, CNRS, Palaiseau, France, Laboratoire de Physique des Plasmas, LPP, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France

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  • Influence of energy deposition mode on plasma bullets development

    POSTER

    Authors

    • Olivier Guaitella

      LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud-11, CNRS, Palaiseau, France

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Spectroscopic Investigations on OH Radicals Generated in He/Water and Air/Water Mixtures by an Atmospheric Pressure Surface Discharge Micro Plasma Device

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    View abstract →

  • Tuning and biasing techniques for multiple frequency capacitive plasmas in ferromagnetic PVD applications and their effect on film quality

    ORAL

    Authors

    • Egmont Semmler

      Institute for Plasmatechnology, Ruhr-University Bochum, Institute for Plasma Technology, Ruhr-University Bochum

    • Stefan Bienholz

      Institute for Plasma Technology, Ruhr-University Bochum

    • Peter Awakowicz

      Institute for Plasmatechnology, Ruhr-University Bochum, Institute for Plasma Technology, Ruhr-University Bochum, Germany, Institute for Plasma Technology, Ruhr-University Bochum

    • Tim Baloniak

      University of Bochum, Germany, Workgroup Reactive Plasmas, Ruhr-University Bochum

    • Achim von Keudell

      Workgroup Reactive Plasmas, Ruhr-University Bochum

    View abstract →

  • Low pressure gas breakdown in longitudinal combined electric fields

    POSTER

    Authors

    • Valeriy Lisovskiy

      Kharkov National University, 4 Svobody sq., Kharkov, 61077, Ukraine

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    View abstract →

  • Two modes of ccp rf discharge in CF4

    POSTER

    Authors

    • Olga Proshina

      Skobeltsyn Institute of Nuclear Physics, Moscow State University

    • Tatyana Rakhimova

      Skobeltsyn Institute of Nuclear Physics, Moscow State University

    • Alexander Rakhimov

      Skobeltsyn Institute of Nuclear Physics, Moscow State University

    • Dmitry Voloshin

      Skobeltsyn Institute of Nuclear Physics, Moscow State University

    View abstract →

  • Excitation dynamics in electrically asymmetric capacitively coupled radio frequency discharges

    POSTER

    Authors

    • Julian Schulze

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Simulation study of collisionless heating in capacitively coupled discharges

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Miles Turner

      Dublin City University, Dublin City University, Ireland, National Centre For Plasma Science and Technology, Dublin City University, Ireland, NCPST, Dublin City University, Dublin 9, Ireland, NCPST, School of Physical Sciences, DCU, NCPST, DCU

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  • Multiple frequency capacitive plasmas for PVD: Influence of external process parameters on ferromagnetic film properties

    POSTER

    Authors

    • Stefan Bienholz

      Ruhr University Bochum, Institute for Plasma Technology

    • Egmont Semmler

      Ruhr University Bochum, Institute for Plasma Technology

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • The EAE in geometrically asymmetric dual frequency capacitively coupled radio frequency discharges

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Edmund Schuengel

      Institute for Plasma and Atomic Physics, Ruhr-University Bochum

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Power dissipation in electrically asymmetric dual frequency capacitively coupled radio frequency discharges

    POSTER

    Authors

    • Edmund Schuengel

      Institute for Plasma and Atomic Physics, Ruhr-University Bochum

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Experimental and theoretical study of dynamic effects in low-frequency capacitively coupled discharges

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    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Capacitively coupled radio-frequency discharges in nitrogen at low-pressure

    POSTER

    Authors

    • L.L. Alves

      IPFN-LA/IST, Lisboa, Portugal, IPFN-LA/IST, Portugal

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Characterization of a low pressure capacitively coupled RF discharge in N2-H2

    POSTER

    Authors

    • G. Wattieaux

      GREMI, Universite d Orleans, France

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • The effect of nitrogen impurity on the DC breakdown voltage in argon at micrometer gaps

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Self-consistent modeling of atmospheric micro-plasmas produced by a microwave source

    POSTER

    Authors

    • L.L. Alves

      IPFN-LA/IST, Lisboa, Portugal, IPFN-LA/IST, Portugal

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    View abstract →

  • Microplasmas for Clinical Breath Analysis

    ORAL

    Authors

    • Paul Maguire

      NIBEC, University of Ulster, NIBEC University of Ulster

    • James Greenan

      NIBEC University of Ulster, NIBEC, University of Ulster

    • Charles Mahony

      NIBEC, University of Ulster, NIBEC University of Ulster

    • James McLaughlin

      NIBEC, University of Ulster

    • Davide Mariotti

      NAMRI - University of Ulster (UK), NIBEC, University of Ulster, NIBEC University of Ulster

    View abstract →

  • The effects of dielectric layer and a driving method on the discharge characteristics of atmospheric-pressure micro plasmas

    ORAL

    Authors

    • Hyo-Won Bae

      Pusan Natl Univ, Korea

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Anomalous response of lossy plasmas immersed in metamaterial structure in the microwave range

    ORAL

    Authors

    • Osamu Sakai

      Kyoto University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Phase Resolved OES of Coaxial Microplasma Jet Operated in He or Ar

    ORAL

    Authors

    • Jan Benedikt

      Ruhr-Universit\"at Bochum, Ruhr-University Bochum

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Micro-Discharges within Voids of Sub-Millimeter Dimensions

    ORAL

    Authors

    • Alireza Ganjovi

      Department of Photonics, International Center of Science \& High Technology \& Environmental Science, Mahan, Kerman, Iran

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Dynamics of atmospheric pressure plasma bullets in He-Ar mixtures

    ORAL

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    View abstract →

  • Time dependence measurement of electron density and temperature of a 60 Hz nonequilibrium atmospheric pressure plasma by laser Thomson scattering

    ORAL

    Authors

    • Fengdong Jia

      Plasma Nanotechnology Research center, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

    • Naoya Sumi

      Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603

    • Kenji Ishikawa

      Nagoya Univ., Nagoya University, Plasma Nanotechnology Research center, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

    • Hiroyuki Kano

      NU Eco-Engineering Co., Ltd., 1237-87 Umazutsumi, Kurozasa-cho, Miyoshi-shi, Aichi 470-0201, Japan

    • Hirotoshi Inui

      Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603

    • Keigo Takeda

      Department of Electrical Engineering and Computer Science, Nagoya University, Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603

    • Hiroki Kondo

      Nagoya University, Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603

    • Makoto Sekine

      Nagoya University, Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603

    • Masaru Hori

      Nagoya University, Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya Univ., Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603

    View abstract →

  • Quantitative shadowgraphy on an atmospheric DC laminar argon plasma jet

    ORAL

    Authors

    • Charles de Izarra

      GREMI UMR6606 CNRS Orleans University France

    • Nuno Cerqueira

      GREMI UMR6606 CNRS Orleans University France

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    View abstract →

  • Gas flow dependence of ground state atomic oxygen in plasma needle discharge at atmospheric pressure

    ORAL

    Authors

    • Nikolas Knake

      Ruhr-Universitaet Bochum

    • Yukinori Sakiyama

      University of California at Berkeley, University of California, Berkeley

    • Daniel Schroeder

      Ruhr-Universitaet Bochum

    • David Graves

      University of California at Berkeley, University of California, Berkeley

    • Volker Schulz-von der Gathen

      Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Ruhr-Universitaet Bochum, Institute for Experimental Physics II: Applied Plasma Physics, Ruhr-Universit\"at Bochum, 44780 Bochum, Germany

    View abstract →

  • Research on optimum condition to prepare carbon nano structure using MOCVD

    POSTER

    Authors

    • Takeru Kanazawa

      Sasebo National College of Technology

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Deposition of fluorinated diamond-like carbon films using pulsed plasma thruster

    POSTER

    Authors

    • Takashi Kimura

      Nagoya Institute of Technology

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Room-Temperature Deposition of Silicon Nitride Films with Very High Rates Using Atmospheric-Pressure Plasma Chemical Vapor Deposition

    POSTER

    Authors

    • Hiroaki Kakiuchi

      Osaka University, Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

    • Hiromasa Ohmi

      Department of Precision Science \& Technology, Osaka University, Osaka University, Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

    • Kiyoshi Yasutake

      Osaka University, Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

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  • Formation mechanism of indium-zinc-oxide film using RF magnetron sputtering based on optical diagnostics of gas phase

    ORAL

    Authors

    • Takayuki Ohta

      Faculty of Systems Engineering, Wakayama University, Wakayama University, Faculty of systems engineering, Wakayama University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Atmospheric pressure deposition of metal oxide films by an DC Arc Plasmatron

    POSTER

    Authors

    • Oleksiy Penkov

      Jeju National University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Characterization of copper nitride thin films deposited by DC magnetron reactive sputtering

    ORAL

    Authors

    • Davoud Dorranian

      Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Diamond and DLC Thin Film Preparation by Microwave Plasma Chemical Vapor Deposition under the Open-Air Condition

    POSTER

    Authors

    • Masahiro Tanaka

      Ehime University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Capacitively Coupled Plasma Source with Comb-Type Electrodes for Uniform Plasma Processing

    POSTER

    Authors

    • Hirotaka Toyoda

      Nagoya University, Nagoya Univ.

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Synthesis of High Quality SiO$_{2}$ Film by Capacitively-Coupled Plasma CVD with Comb-Type Electrodes

    POSTER

    Authors

    • Takahiro Hiramatsu

      Kochi Univ. Technol.

    • Tokiyoshi Matsuda

      Kochi Univ. Technol.

    • Toshiyuki Kawaharamura

      Kochi Univ. Technol.

    • Mamoru Furuta

      Kochi Univ. Technol.

    • Takashi Hirao

      Kochi Univ. Technol.

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Hirotaka Toyoda

      Nagoya University, Nagoya Univ.

    View abstract →

  • Calculation of argon-mercury mixture ionization coefficient in low-current glow discharge

    POSTER

    Authors

    • Gennady Bondarenko

      Research Institute of Advanced Materials and Technologies of Moscow Institute of Electronics and Mathematics, M.Pionerskaya 12, Moscow, 115054, Russia

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Vladimir Kristya

      Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia

    View abstract →

  • Measurement of the plasma temperature in HID-lamps by emission- and absorption-spectroscopy of Dy spectral lines

    POSTER

    Authors

    • M. Westermeier

      Institute for Plasma Technology, Ruhr-University Bochum, Germany

    • C. Ruhrmann

      Institute for Plasma Technology, Ruhr-University Bochum, Germany

    • A. Bergner

      Institute for Plasma Technology, Ruhr-University Bochum, Germany

    • Peter Awakowicz

      Institute for Plasmatechnology, Ruhr-University Bochum, Institute for Plasma Technology, Ruhr-University Bochum, Germany, Institute for Plasma Technology, Ruhr-University Bochum

    • J. Mentel

      Institute for Plasma Technology, Ruhr-University Bochum, Germany

    View abstract →

  • Investigation of the arc attachment at thoriated cathodes in a model lamp by measurement and simulation

    POSTER

    Authors

    • A. Bergner

      Electrical Engineering and Plasma Technology (AEPT), Ruhr-University Bochum, Germany, Institute for Plasma Technology, Ruhr University Bochum, Germany

    • M. Westermeier

      Electrical Engineering and Plasma Technology (AEPT), Ruhr-University Bochum, Germany, Institute for Plasma Technology, Ruhr University Bochum, Germany

    • C. Ruhrmann

      Electrical Engineering and Plasma Technology (AEPT), Ruhr-University Bochum, Germany, Institute for Plasma Technology, Ruhr University Bochum, Germany

    • J. Mentel

      Electrical Engineering and Plasma Technology (AEPT), Ruhr-University Bochum, Germany, Institute for Plasma Technology, Ruhr University Bochum, Germany

    • P. Awakowicz

      Department of Electrical Engineering and Information Sciences, Ruhr-University Bochum, Germany, Electrical Engineering and Plasma Technology (AEPT), Ruhr-University Bochum, Germany, Institute for Plasma Technology, Ruhr University Bochum, Germany, Ruhr-University Bochum, GER

    View abstract →

  • Discharge characteristics of micro-needle array diamond structure

    POSTER

    Authors

    • Takayuki Misu

      Department of Home Electronics Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Tsukasa Higa

      Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan

    • Miki Goto

      Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan

    • Toshihiko Arai

      Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan

    View abstract →

  • Investigation of the emitter effect in high intensity discharge lamps

    POSTER

    Authors

    • C. Ruhrmann

      Electrical Engineering and Plasma Technology (AEPT), Ruhr-University Bochum, Germany, Institute for Plasma Technology, Ruhr University Bochum, Germany

    • M. Westermeier

      Electrical Engineering and Plasma Technology (AEPT), Ruhr-University Bochum, Germany, Institute for Plasma Technology, Ruhr University Bochum, Germany

    • A. Bergner

      Electrical Engineering and Plasma Technology (AEPT), Ruhr-University Bochum, Germany, Institute for Plasma Technology, Ruhr University Bochum, Germany

    • J. Mentel

      Electrical Engineering and Plasma Technology (AEPT), Ruhr-University Bochum, Germany, Institute for Plasma Technology, Ruhr University Bochum, Germany

    • P. Awakowicz

      Department of Electrical Engineering and Information Sciences, Ruhr-University Bochum, Germany, Electrical Engineering and Plasma Technology (AEPT), Ruhr-University Bochum, Germany, Institute for Plasma Technology, Ruhr University Bochum, Germany, Ruhr-University Bochum, GER

    View abstract →

  • Uniformity in length of carbon nanotwists by filament discharge treatment for stable field electron emission

    POSTER

    Authors

    • Yoshiyuki Suda

      Toyohashi University of Technology

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Atmospheric Pressure Micro Inductively Coupled Plasma Source with Floating Electrode

    ORAL

    Authors

    • Minoru Sasaki

      Toyota Technological Institute

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Shinya Kumagai

      Toyota Technological Institute

    • Masaru Hori

      Nagoya University, Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya Univ., Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603

    View abstract →

  • A three-dimensional hybrid simulation with electron-fluid and ion-particle model for micro dielectric barrier discharges

    ORAL

    Authors

    • Seung Bo Shim

      Pusan Natl Univ. Korea

    • In Cheol Song

      Pusan Natl Univ, Korea, Pusan Natl Univ. Korea

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Ho-Jun Lee

      Pusan National University, Korea, Pusan Natl Univ, Pusan Natl Univ. Korea

    • Chung-Hoo Park

      Pusan Natl Univ. Korea

    • Hae June Lee

      Pusan National University, Pusan National University, Korea, Pusan Natl Univ, Pusan Natl Univ. Korea

    View abstract →

  • AC (20kHz) excited plasmas in contact with liquid

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Characteristics of helium/water vapour jet plasmas

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Secondary Ionization Coefficient of MgO and Accumulated Charge

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Susumu Suzuki

      Chiba Institute of Technology

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Haruo Itoh

      Chiba Institute of Technology

    View abstract →

  • Hysteresis through E-H and H-E transitions in Ar-ICP using space- and time-resolved optical emission spectroscopy

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Measurement of the Density Distribution of the Non-emissive Ar Metastable State in a 2f-CCP by Using OES with a Pair of Emission Lines

    POSTER

    Authors

    • Kazuki Takahashi

      Keio University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Time-dependent of recombining Plasma with Pulse Plasma flow

    POSTER

    Authors

    • Takashi Torada

      Tokai University

    • Akira Tonegawa

      Tokai Universtiy, Tokai University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • VUV spectroscopic diagnostics of the vibrational temperature to the ground state of hydrogen molecules in recombination plasma

    POSTER

    Authors

    • Takaaki Iijima

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Tomographic Analysis of a Plasmoid in Supersonic MW Post-Discharge

    POSTER

    Authors

    • Milka Nikolic

      Old Dominion University

    • Ana Samolov

      Old Dominion University, Norfolk VA, Old Dominion University

    • Svetozar Popovic

      Old Dominion University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Leposava Vu\v{s}kovic

      Old Dominion University

    View abstract →

  • Movement of Plasma Components Thrown from a Small Slit into a Cylindrical Container

    POSTER

    Authors

    • Masaaki Kato

      Gunma National College of Technology

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Kinetic Alfv\'{e}n Wave Excitation by magnetosonic Wave in Plasmas

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Visualising heated gas in an RF plasma loudspeaker

    POSTER

    Authors

    • Y.C. Sutton

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Net emission coefficients of argon-iron plasmas

    POSTER

    Authors

    • Martin Wendt

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Optical measurements of gas temperatures in Ar/CO$_{2}$ arc plasma

    POSTER

    Authors

    • Nuno Cerqueira

      GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • A study of frequency analysis on I-V characteristic and acoustic discharge sound correlation in gliding arc discharge

    POSTER

    Authors

    • Ikuya Muramoto

      Sojo University

    • Fumiaki Mitsugi

      Kumamoto University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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