Poster Session II (14:00-15:30)

Poster Session II (14:00-15:30)

POSTER · DTP

Presiders

Role: CHAIR

M. Darnon

ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

Presentations

GLOWS

View abstract →
Effect of added molecular gases (H$_{2}$, O$_{2}$, N$_{2}$) in an analytical glow discharge on the ion signal intensities obtained using a high resolution mass spectrometer

POSTER
Authors
- Viktoria Weinstein
  
  London Metropolitan University
- Edward B.M. Steers
  
  London Metropolitan University
- Tamara Gusarova
  
  London Metropolitan University
- Karol Putyera
  
  EAGLabs inc.
View abstract →
Obstructed DC glow discharge in nitrogen

POSTER
Authors
- Valeriy Lisovskiy
  
  Kharkov National University, 4 Svobody sq., Kharkov, 61077, Ukraine
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Study on Microwave Plasma Source with TM-wave Cavity, of which Bottom Plate Replaced with High-Density Plasma

POSTER
Authors
- Sumio Kogoshi
  
  Science University of Tokyo
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Theoretical analysis of direct current glow discharge plasma in a coaxial structure

POSTER
Authors
- Alireza Niknam
  
  Laser and Plasma Research Inst., Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
A Travelling Wave Sustained Hydrogen Discharge

POSTER
Authors
- Elena Tatarova
  
  Institute of Plasmas and Nuclear Fusion, Instituto Superior Tecnico, Lisbon
- Edgar Felizardo
  
  Institute of Plasmas and Nuclear Fusion, Instituto Superior Tecnico, Lisbon
- Francisco Dias
  
  Institute of Plasmas and Nuclear Fusion, Instituto Superior Tecnico, Lisbon
- Carlos Ferreira
  
  Institute of Plasmas and Nuclear Fusion, Instituto Superior Tecnico, Lisbon
- Boris Gordiets
  
  Lebedev Physics Institute, Moscow
View abstract →
Electron current evolution of a two-surface multipactor discharge

POSTER
Authors
- Timothy Graves
  
  The Aerospace Corporation
- Rostislav Spektor
  
  The Aerospace Corporation
- Daniel Larson
  
  The Aerospace Corporation
View abstract →
Spectroscopic studies of long-lived excited species in flowing nitrogen afterglows at intermediate pressures

POSTER
Authors
- Robert Carman
  
  Macquarie University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- Peter Ha
  
  Macquarie University
- Conor Martin
  
  BluGlass Ltd
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- Cormac Corr
  
  The Australian National University, Australia, Australian National University
- Rod Boswell
  
  Australian National University
View abstract →
Virtual Cathode lifetimes and floating potential measurements in a Polywell{\texttrademark} fusion device

POSTER
Authors
- Matthew Carr
  
  School of Physics, University of Sydney
- Joe Khachan
  
  School of Physics, University of Sydney
View abstract →
ABSTRACT WITHDRAWN

View abstract →
Study on expansion of electron sheath and breakdown in it

POSTER
Authors
- Yeong-Shin Park
  
  Seoul National University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Electrical characteristics of an atmospheric pressure plasma jet with helium flow

POSTER
Authors
- Gordana Malovic
  
  Institute of Physics Belgrade Serbia
- Dejan Maletic
  
  Institute of Physics Belgrade Serbia
- Nevena Puac
  
  Institute of Physics Belgrade Serbia
- Sasa Lazovic
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- Zoran Petrovic
  
  Institute of Physics, University of Belgrade, P.O.Box 68, 11080 Zemun, Belgrade, Serbia, Institute of Physics Belgrade, Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Zemun, Belgrade, Serbia, Institute of Physics Belgrade Serbia, Institute of Physics POB 68 11080 Zemun Serbia
View abstract →
Modeling of heavy particle collisions in high E/N discharges in helium

POSTER
Authors
- Zoran Petrovic
  
  Institute of Physics, University of Belgrade, P.O.Box 68, 11080 Zemun, Belgrade, Serbia, Institute of Physics Belgrade, Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Zemun, Belgrade, Serbia, Institute of Physics Belgrade Serbia, Institute of Physics POB 68 11080 Zemun Serbia
- Zeljka Nikitovic
  
  Institute of Physics Belgrade Serbia
- Svetlana Radovanov
  
  Varian Semiconductor Equipment Associates, Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, MA 01930 USA
- Vladimir Stojanovic
  
  Institute of Physics Belgrade Serbia
View abstract →
New Method for Homogeneous Plasma Production at Gas Pressure 0.005 -- 5 Pa Used for Substrate Etching, Nitriding, Ion Implantation and Coating Deposition

ORAL
Authors
- Alexander Metel
  
  Moscow State University of Technology ``Stankin''
- Sergei Grigoriev
  
  Moscow State University of Technology ``Stankin''
- Yuriy Melnik
  
  Moscow State University of Technology ``Stankin''
- Vladimir Prudnikov
  
  Moscow State University of Technology ``Stankin''
View abstract →
Characterization of high-power atmospheric pressure transient micro-glow discharge using double-pulsed high-voltages

ORAL
Authors
- Shinji Ibuka
  
  Tokyo Institute of Technology
- Jun Kikuchi
  
  Tokyo Institute of Technology
- Naoaki Yoshida
  
  Tokyo Institute of Technology
- Koichi Igarashi
  
  Tokyo Institute of Technology
- Shozo Ishii
  
  Tokyo Institute of Technology
View abstract →
Qualitative theory of multi-hollow microwave plasma source

ORAL
Authors
- Ivan Ganachev
  
  Shibaura Mechatronics Corporation
- Iji Liang
  
  Chubu University
- Hideo Sugai
  
  Chubu University, Department of Electronics \& Information Engineering, Chubu University
View abstract →
Numerical analyzing of unstable modes propagating along the magnetic field on magnetized microwave produced plasmas

ORAL
Authors
- Mohammad Ghorbanalilu
  
  Azarbaijan University of Tarbiat Moallem, Tabriz, Iran
View abstract →
MAGNETICALLY ENHANCED PLASMAS: ECR, HELICON, MAGNATRON, OTHERS

View abstract →
Production and Application of Magnetized Plasmas Generated by Rotating Magnetic Fields

ORAL
Authors
- John Slough
  
  MSNW LLC
View abstract →
A novel equilibrium theory of helicon discharges

ORAL
Authors
- Davide Curreli
  
  Universit\`a degli Studi di Padova, Italy; University of California, Los Angeles, California, 90095-1594, U.S.A.
- Francis F. Chen
  
  University of California, Los Angeles, California, 90095-1594, U.S.A.
View abstract →
Two-dimensional self-consistent model of an end-Hall (gridless) ion source

POSTER
Authors
- Noureddine Oudini
  
  LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universit\'e de Toulouse, France
- Gerjan Hagelaar
  
  CNRS-Laplace Toulouse, France, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universit\'e de Toulouse, France
- Laurent Garrigues
  
  LAPLACE (Laboratoire, PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universit\'e de Toulouse, France
- Jean-Pierre Boeuf
  
  LAPLACE, CNRS and Universite Paul Sabatier, Toulouse, France, LAPLACE (LAboratoire PLAsma et Conversion d Energie), CNRS and Universite de Toulouse, France, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universit\'e de Toulouse, France
View abstract →
Improvement of the fluid electron description in a hybrid model of a Hall effect thruster by means of the ion velocity profile measurements

POSTER
Authors
- Laurent Garrigues
  
  LAPLACE (Laboratoire, PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universit\'e de Toulouse, France
- St\'ephane Mazouffre
  
  ICARE - CNRS, ICARE, CNRS, Orl\'eans, France, ICARE (Institut de Combustion A\'erothermique R\'eactivit\'e et Environnement), CNRS
- Guillaume Bourgeois
  
  ICARE, CNRS, Orl\'eans, France, ICARE (Institut de Combustion A\'erothermique R\'eactivit\'e et Environnement), CNRS
View abstract →
Controlling Plasma Properties in Collisionless Magnetized Plasma with Active Boundaries

POSTER
Authors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Two-dimensional Particle-in-cell model of a Hall effect thruster

POSTER
Authors
- Philippe Coche
- Laurent Garrigues
  
  LAPLACE (Laboratoire, PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universit\'e de Toulouse, France
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Resonance Hair Pin Probe and Laser Photo Detachment Technique for Measuring Time Resolve Negative Ion Density in Pulsed DC Magnetron Discharge

POSTER
Authors
- N. Sirse
  
  National Centre For Plasma Science and Technology, Dublin City University, Ireland
- S.K. Karkari
  
  Dublin City University, Ireland and Institute for Plasma Research, India, National Centre for Plasma Science and Technology, Dublin City University, Ireland and Institute for Plasma Research, Bhat, Gandhinagar, India, NCPST, Dublin City University, Dublin 9, Ireland \& Institute for Plasma Research, Bhat, Gandhinagar, Gujarat, India, 382428, National Centre For Plasma Science and Technology, Dublin City University, Ireland and Institute For Plasma Research, Bhat, Ghandhinagar, India
- R. Dodd
  
  Department of Electrical and Engineering Department, University of Liverpool, United Kingdom
- S.-D. You
  
  Department of Electrical and Engineering Department, University of Liverpool, United Kingdom
- J.W. Bradley
  
  Department of Electrical and Engineering Department, University of Liverpool, United Kingdom
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Experimental Investigation of Expandable Multiple Helicon Ignition with Permanent Magnets

POSTER
Authors
- Sanghyuk An
  
  KAIST
- Hongyoung Chang
  
  Department of Physics, Korea Advanced Institute of Science and Technology, KAIST
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Concept of Dynamic Control of Magnetic Field for High-Throughput and Wide-Area Etching by Neutral Loop Discharge Plasma

POSTER
Authors
- Hirotake Sugawara
  
  Hokkaido University
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The Optimization of Magnetron System Operating Characteristics by Varying Additional Transverse Anode Magnetic Field

POSTER
Authors
- A. Bizyukov
  
  V.N. Karazin Kharkiv National University
- O. Girka
  
  V.N. Karazin Kharkiv National University
- K. Sereda
  
  V.N. Karazin Kharkiv National University
- V. Sleptsov
  
  Moscow State Aviation Technological University (MATI)
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Simulating ECRH with VORPAL, a Particle-in-Cell Code, using Higher-Order Particles

POSTER
Authors
- Christine Roark
  
  Tech-X Corportation
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Evolution of electron energy distribution and its diagnostics on high density electron cyclotron resonance hydrogen plasma

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Authors
- Lekha Nath Mishra
  
  University of Troms{\o}
- Ashild Fredriksen
  
  University of Troms{\o}
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PLASMA DEPOSITION II

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Novel method to produce catalysts for oxygen reduction reaction by dual plasma process

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Authors
- Christian Walter
  
  Leibniz Institute for Plasma Science and Technology
- Volker Br\"user
  
  Leibniz Institute for Plasma Science and Technology
- Antje Quade
  
  Leibniz Institute for Plasma Science and Technology
- Klaus-Dieter Weltmann
  
  Leibniz Institute for Plasma Science and Technology
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Characteristics of Near-Infrared n-Type Nanocrystalline FeSi$_{2}$/i-Si/p-Type Si Heterojunctions prepared by Facing-Targets Direct Current Sputtering

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Authors
- Nathaporn Promros
  
  Kyushu Universiy, Kyushu University
- Kenji Kawai
  
  Kyushu University
- Mahmoud Shaban
  
  South Valley University
- Tsuyoshi Yoshitake
  
  Kyushu University
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Water-Repellent Thin Film Deposition using a Gas-Liquid Mixed Phase Plasma Jet

POSTER
Authors
- Yoshihito Takahashi
  
  Department of Materials, Physics and Energy Engineering, Nagoya University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Differences in nano structure on PET films formed with low-pressure and atmospheric pressure plasmas

POSTER
Authors
- Takashi Kuriki
  
  Department of Materials, Physics and Energy Engineering, Nagoya University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Inductively Coupled Plasma Assisted Sputter-Deposition of Al-doped ZnO Thin Films

POSTER
Authors
- Yoshinobu Matsuda
  
  Nagasaki University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Synthesis of microcrystalline SiC film at low temperature ($\le$ 600$^{\circ}$C) by hydrogen plasma chemical transport at sub atmospheric pressure

POSTER
Authors
- Hiromasa Ohmi
  
  Department of Precision Science \& Technology, Osaka University, Osaka University, Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Fabrication of transparent protective DLC films on polymer materials

POSTER
Authors
- Sangmin Baek
  
  Department of Materials, Physics and Energy Engineering, Nagoya University
- Tatsuru Shirafuji
  
  Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University
- Nagahiro Saito
  
  Nagoya University, EcoTopia Science Research Institute, Nagoya University
- Osamu Takai
  
  EcoTopia Science Research Institute, Nagoya University
- SeongHwan Lee
  
  Department of Materials Science and Engineering, Korea University
- Heon Lee
  
  Department of Materials Science and Engineering, Korea University
View abstract →
Plasma polymerized PEDOT thin films by double discharge technique

POSTER
Authors
- Hilal Goktas
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Influences of Repetition Rate of Laser Pulses on Growth of AlN Thin Films on Sapphire(0001) by Reactive Pulsed Laser Deposition

POSTER
Authors
- Tomohiro Yoshida
  
  Kyushu University
- Kazushi Sumitani
  
  Saga Light Source, Kyushu Synchrotron Light Research Center
- Ryota Ohtani
  
  Saga Light Source
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- Tsuyoshi Yoshitake
  
  Kyushu University
View abstract →
Preparation of AZO thin films by pulsed laser deposition for all-solid-state ECDs

POSTER
Authors
- Tamiko Ohshima
  
  Sasebo National College of Technology
- Yuuki Murakami
  
  Sasebo National College of Technology
- Hiroharu Kawasaki
  
  Sasebo National College of Technology
- Yoshiaki Suda
  
  Sasebo National College of Technology
- Yoshihito Yagyu
  
  Sasebo National College of Technology
View abstract →
Formation of n-Type $\beta $-FeSi$_{2}$/p-Type Si Heterojunctions by Facing-Targets Direct-Current Sputtering

POSTER
Authors
- Shota Izumi
  
  Kyushu University
- Nathaporn Promros
  
  Kyushu Universiy, Kyushu University
- Mahmoud Shaban
  
  South Valley University
- Keita Nomoto
  
  Kyushu University
- Tsuyoshi Yoshitake
  
  Kyushu University
View abstract →
Fabrication of a-ZnON films by Ar/N$_{2}$ sputtering for solid-phase crystallization of ZnO

POSTER
Authors
- Naho Itagaki
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Crystallographic Study of Cubic Phase AlN Thin Films Heteroepitaxially Grown on Sapphire (0001) Substrates by Pulsed Laser Deposition

POSTER
Authors
- Kazushi Sumitani
  
  Saga Light Source, Kyushu Synchrotron Light Research Center
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Effects of Ambient Nitrogen on Growth of Cubic AlN Films on Sapphire (0001) Substrates by Pulsed Laser Deposition

POSTER
Authors
- Kazushi Sumitani
  
  Saga Light Source, Kyushu Synchrotron Light Research Center
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Preparation of n-Type $\beta $-FeSi$_{2}$/p-Type Si Heterojunctions for Near-Infrared Photodetectors by Pulsed Laser Deposition

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Authors
- Nathaporn Promros
  
  Kyushu Universiy, Kyushu University
- Chen Li
  
  Kyushu University
- Wataru Yokoyama
  
  Kyushu University
- Tsuyoshi Yoshitake
  
  Kyushu University
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Influences of Boron-Doping on Growth of Ultrananocrystalline Diamond$\cdot $Hydrogenated Amorphous Carbon Composite Films by Pulsed Laser Deposition

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Authors
- Kenji Hanada
  
  Kyushu University
- Tsuyoshi Yoshitake
  
  Kyushu University
- Shinya Ohmagari
  
  Kyushu University
- Akira Nagano
  
  Kyushu University
- Ryota Ohtani
  
  Saga Light Source
- Kazushi Sumitani
  
  Saga Light Source, Kyushu Synchrotron Light Research Center
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The influence of substrate biasing on the crystallinity of Al$_2$O$_3$ films

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Authors
- Marina Prenzel
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Evaluation of aluminum nitride films deposited by using magnetron sputtering technique under controlled gas flow

POSTER
Authors
- Yusuke Ohtsuka
  
  Osaka University
View abstract →
Silicon oxide permeation barrier coating of PET bottles and foils using a biased microwave plasma

POSTER
Authors
- Simon Steves
  
  Institute for Plasmatechnology, Ruhr-University Bochum, Ruhr-University Bochum, Institute for Plasma Technology, Germany
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Behaviour of Hybrid PVD-PECVD Process in Comparison with Conventional Reactive Magnetron Sputtering

POSTER
Authors
- Tereza Schmidtova
  
  Masaryk University, Brno, Czech Republic
- Petr Vasina
  
  Masaryk University, Brno, Czech Republic
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PLASMAS FOR NANOTECHNOLOGIES

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Pt Germanidation of a-Ge:H Enhanced by Remote Hydrogen Plasma Exposure

ORAL
Authors
- Katsunori Makihara
  
  Hiroshima University
- Yusuke Miyazaki
  
  Hiroshima University
- Yusuke Miyazaki
  
  Hiroshima University
- Yusuke Miyazaki
  
  Hiroshima University
- Mitsuhisa Ikeda
  
  Hiroshima University
- Seiichi Miyazaki
  
  Nagoya University
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Pulsed Nd:YAG Laser heating of Multi-walled carbon nanotubes film

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Authors
- Ryosuke Kozai
  
  Tokai University
- Toshiyuki Nakamiya
  
  Tokai University
- Yoichiro Iwasaki
  
  Tokai University
- Yoshito Sonoda
  
  Tokai University
- Fumiaki Mitsugi
  
  Kumamoto University
- Keisuke Semba
  
  Kumamoto University
- Tomoaki Ikegami
  
  Kumamoto University
- Ikuya Muramoto
  
  Sojo University
- Ikuya Muramoto
  
  Sojo University
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Microwave plasma synthesis of magnetic nanoparticles

POSTER
Authors
- Vit Kudrle
  
  Department of Physical Electronics, Masaryk University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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- Tooru Harigai
  
  Kochi University of Technology
- Akimitsu Hatta
  
  Kochi University of Technology
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Application of helium plasma irradiated tungsten material as a new photocatalyst

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- Tomoko Yoshida
  
  EcoTopia Science Institute, Nagoya University
- Reo Etoh
  
  Graduate School of Engineering, Nagoya University
- Hisao Yoshida
  
  Graduate School of Engineering, Nagoya University
- Shin Kajita
  
  Graduate School of Engineering, Nagoya University
- Noriyasu Ohno
  
  Graduate School of Engineering, Nagoya University
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On the kinetic description of Martian Entry Plasma

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- D.J. Drake
  
  University of Iowa
- Milka Nikolic
  
  Old Dominion University
- Svetozar Popovic
  
  Old Dominion University
- Leposava Vu\v{s}kovic
  
  Old Dominion University
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Structural Analysis of ZnO Nano-phosphors Fabricated by Pulsed Laser Ablation under the Glow Discharge Condition

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- Qiang Ma
  
  Shizuoka University
- Teguh Endah Saraswati
  
  Shizuoka University
- Akihisa Ogino
  
  Shizuoka University
- Masaaki Nagatsu
  
  Shizuoka University
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Synthesis of nanopowders of elements and compounds in thermal plasma

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- Andrey Samokhin
  
  Institute of Metallurgy and Material Sciences Russian Academy of Sciences
- Nikolay Alexeev
  
  Institute of Metallurgy and Material Sciences Russian Academy of Sciences
- Sergey Kornev
  
  Institute of Metallurgy and Material Sciences Russian Academy of Sciences
- Michael Sinayskiy
  
  Institute of Metallurgy and Material Sciences Russian Academy of Sciences
- Alexey Astashov
  
  Institute of Metallurgy and Material Sciences Russian Academy of Sciences
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Nanoparticle film deposition via mist-included plasma source

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- Kosuke Takenaka
  
  Osaka University, Joining and Welding Research Institute, Osaka University
- Yusuke Okumura
  
  Joining and Welding Research Institute, Osaka University
- Ken Cho
  
  Osaka University, Joining and Welding Research Institute, Osaka University, Osaka Univ.
- Yuichi Setsuhara
  
  Osaka University, Joining and Welding Research Institute, Osaka University
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Formation of Nanosize-Needle and Nanosize-Cauliflower on Carbon Surface with Cold Plasma and its Applications

POSTER
Authors
- Masaaki Kato
  
  Gunma National College of Technology
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Multi-colored luminescence from luminescent nanocrystalline silicon particles terminated by nitrogen

POSTER
Authors
- Tomonori Fujino
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
One dimensional micro-patterning on flexible substrate by low frequency atmospheric pressure micro jet plasma

POSTER
Authors
- Heesoo Jung
  
  KAIST
- Dan Bee Kim
  
  Korea Research Institute of Standards and Science
- Bomi Gweon
  
  KAIST
- Jong-Joo Rha
  
  Korea Institute of Materials Science
- Wonho Choe
  
  KAIST
View abstract →
Morphological control of carbon nanowalls by reactive ion etching

POSTER
Authors
- Masaru Hori
  
  Nagoya University, Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya Univ., Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603
- Hiroki Kondo
  
  Nagoya University, Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Low-Hydrogen-Content SiN$_{x}$ Films Prepared Under Low-Temperature Conditions and Its Application to Encapsulation Layers for Top-Emission Organic Light-Emitting Devices

ORAL
Authors
- Kazufumi Azuma
  
  Shimadzu Corporation
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Surface Modification by Water Vapor Plasma for Damage-free Roughness Smoothing of 4H-SiC

ORAL
Authors
- Kazuya Yamamura
  
  Research Center for Ultra-precision Science and Technology, Graduate School of Engineering, Osaka University, Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, Osaka University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Fabrication of a single layer of polystyrene nanoparticle array, and their use as templates for NIR-light responsible metallodielectric plasmonic nanoshells

ORAL
Authors
- Shuhei Uchida
  
  Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University
- Kazuya Yamamura
  
  Research Center for Ultra-precision Science and Technology, Graduate School of Engineering, Osaka University, Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, Osaka University
- Nobuyuki Zettsu
  
  Research Center for Ultra-precision Science and Technology, Graduate School of Engineering, Osaka University, Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University
View abstract →
Catalyst-free electroless Cu plating of fluoropolymer surface through an atmospheric pressure plasma assisted self-assembly

ORAL
Authors
- Nobuyuki Zettsu
  
  Research Center for Ultra-precision Science and Technology, Graduate School of Engineering, Osaka University, Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University
- Hiroki Akiyama
  
  Research Center for Ultra-precision Science and Technology, Graduate School of Engineering, Osaka University
- Kazuya Yamamura
  
  Research Center for Ultra-precision Science and Technology, Graduate School of Engineering, Osaka University, Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, Osaka University
View abstract →
Immobilization of Biomolecules onto Graphene Layer-Encapsulated Magnetic Nanoparticles Functionalized by Inductively Coupled Plasma

POSTER
Authors
- Teguh Endah Saraswati
  
  Shizuoka University
- Akihisa Ogino
  
  Shizuoka University
- Masaaki Nagatsu
  
  Shizuoka University
View abstract →
Numerical study of the plasma chemistry for an inductively coupled plasma used for the synthesis of carbon nanotubes

POSTER
Authors
- Ming Mao
  
  PLASMANT Research Group, Department of Chemistry, University of Antwerp
- Annemie Bogaerts
  
  University of Antwerp, Belgium, University of Antwerp, PLASMANT Research Group, Department of Chemistry, University of Antwerp
View abstract →
Time-Programmed Plasma CVD for Detailed Structure Control of Single-Walled Carbon Nanotubes

ORAL
Authors
- Toshiaki Kato
  
  Department of Electronic Engineering, Tohoku University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Large Area DC Plasma Filter for Antenna

POSTER
Authors
- Shen Shou Max Chung
  
  Southern Taiwan University
View abstract →
PLASMA PROPULSION

View abstract →
Small-sized plasma jet by a high current pseudo-spark discharge and its electrode durability

POSTER
Authors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Discharge activated supersonic pulsed gas jets

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Authors
- Nikolay Korobeishchikov
  
  Novosibirsk State University
- Alexandr Zarvin
  
  Novosibirsk State University
- Valeriy Kalyada
  
  Novosibirsk State University
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Control of the plasma potential in strong electronegative plasmas and ion-ion plasmas

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Authors
- Lara Popelier
  
  LPP, CNRS - Ecole Polytechnique
- Ane Aanesland
  
  CNRS-Ecole Polytechnique, LPP, CNRS - Ecole Polytechnique
- Pascal Chabert
  
  Laboratoire de Physique des Plasmas - CNRS, Laboratoire de Physique des Plasmas, LPP, LPP, CNRS - Ecole Polytechnique, Laboratoire de Physique des Plasmas, CNRS-Ecole Polytechnique, Palaiseau, France, LPP - CNRS/Ecole Polytechnique
View abstract →
Transverse component of Xe$^{+}$ ions velocity in the crossed field discharge of a Hall Effect Thruster

POSTER
Authors
- Guillaume Bourgeois
  
  ICARE, CNRS, Orl\'eans, France, ICARE (Institut de Combustion A\'erothermique R\'eactivit\'e et Environnement), CNRS
- St\'ephane Mazouffre
  
  ICARE - CNRS, ICARE, CNRS, Orl\'eans, France, ICARE (Institut de Combustion A\'erothermique R\'eactivit\'e et Environnement), CNRS
- Nader Sadeghi
  
  LSP, Universit\'e Joseph Fourier and CNRS, LTM-CNRS, Univ. Grenoble \& CNRS, France, LSP, Univ. \& CNRS Grenoble, France, CNRS/LSP
View abstract →
Experimental investigation of optical discharges with an ablative wall in channels

POSTER
Authors
- E. Yu. Loktionov
  
  Bauman Moscow State Technical University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Plasma detachment from a magnetic nozzle

POSTER
Authors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Development of Upper Atmosphere Simulator for Air Breathing Ion Engine

POSTER
Authors
- Yasuyoshi Hisamoto
  
  The Graduate University for Advanced Studies
- Kazutaka Nishiyama
  
  Japan Aerospace Exploration Agency, Institute of Space and Astronotical Science, Japan Aerospace Exploration Agency
View abstract →
Plasma assisted combustion of paraffin

POSTER
Authors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Decomposition Mechanism of Organic Compounds in Water Plasma under Atmospheric Pressure

POSTER
Authors
- Narengerile
  
  Tokyo Institute of Technology
- Takayuki Watanabe
  
  Tokyo Institute of Technology
View abstract →
Plasma reforming of ethanol in plasma-liquid system with discharge in gas channel with liquid wall

POSTER
Authors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Reforming of ethanol in plasma of discharge with gas flow of ``tornado'' type and "liquid" electrode

POSTER
Authors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Plasma-stimulated destruction of phenol in water solutions

POSTER
Authors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Ethanol reforming in pulse plasma-liquid system with postdischarge pyrolitic chamber

POSTER
Authors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Nonequilibrium Plasma Assisted Dissociation of Hydrogen Sulfide

POSTER
Authors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
UV and high-voltage pulsed discharge induced degradation of organic molecules in water

ORAL
Authors
- Olga Tchaikovskaya
  
  Siberian Physical Technical Institute, Tomsk, Tomsk State University, Tomsk
- Stanislav Chaikovsky
  
  Institute of High Current Electronics SB RAS, Tomsk, Institute of High Current Electronics SB RAS, Tomsk, Russia
- Irina Sokolova
  
  Siberian Physical Technical Institute, Tomsk
- Georgy Mayer
  
  Tomsk State University, Tomsk
- Olga Tchaikovskaya
  
  Siberian Physical Technical Institute, Tomsk, Tomsk State University, Tomsk
- Ivan Lapin
  
  Institute of atmosphere optics SB RAS, Tomsk
- Ivan Lapin
  
  Institute of atmosphere optics SB RAS, Tomsk
View abstract →
Experimental and Computational Study of Carbon Dioxide Dissociation in an Atmospheric Pressure Microwave Discharge

ORAL
Authors
- Laura Spencer
  
  University of Michigan
- Alec Gallimore
  
  University of Michigan
View abstract →
Gas phase optical emission spectroscopy during remote plasma chemical vapour deposition of GaN and relation to growth dynamics

ORAL
Authors
- Cormac Corr
  
  The Australian National University, Australia, Australian National University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Efficient non-thermal plasma processing by 5 ns pulsed discharge

ORAL
Authors
- Takao Matsumoto
  
  Graduate school of Science and Technology, Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555, Japan
- Takao Namihira
  
  Bioelectrics Research Center, Kumamoto University, 2-39-1, Kurokami, Kumamoto 860-8555, Japan, Bioelectrics Research Center, Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555, Japan
- Hidenori Akiyama
  
  Kumamoto University, Graduate school of Science and Technology, Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555, Japan
View abstract →
BASIC PLASMA PHYSICS

View abstract →
Measurement of Spatiotemporal Gas Temperature during Pulsed Discharge

POSTER
Authors
- Sho Okada
  
  Graduate school of Science and Technology, Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555, Japan
- Douyan Wang
  
  Priority Organization for Innovation and Excellence, Kumamoto University, 2-39-1, Kurokami, Kumamoto 860-8555, Japan
- Takao Namihira
  
  Bioelectrics Research Center, Kumamoto University, 2-39-1, Kurokami, Kumamoto 860-8555, Japan, Bioelectrics Research Center, Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555, Japan
- Sunao Katsuki
  
  Kumamoto University, Priority Organization for Innovation and Excellence, Kumamoto University, 2-39-1, Kurokami, Kumamoto 860-8555, Japan
- Hidenori Akiyama
  
  Kumamoto University, Graduate school of Science and Technology, Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555, Japan
View abstract →
Synergistic effect of dual power on plasma density by shift of power absorption region in inductively coupled plasma

POSTER
Authors
- Jin Young Bang
  
  Hanyang University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- Chin-Wook Chung
  
  Hanyang University, Hanyang Univ. Seoul, South Korea, Department of Electrical Engineering, Hanyang University,17 Heangdang-dong, Seongdong-ku, Seoul 133-791, Republic of Korea, Hanyang University, Seoul, South Korea, HanYang University
View abstract →
On the Boltzmann relation in a cold magnetized plasma

POSTER
Authors
- Lorenzo Nasi
  
  Laboratoire de Physique des Plasmas
- Jean-Luc Raimbault
  
  Laboratoire de Physique des Plasmas
View abstract →
Energetic Charged Particle Collisions in Electronegative Plasmas

POSTER
Authors
- Svetlana Radovanov
  
  Varian Semiconductor Equipment Associates, Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, MA 01930 USA
- Ludovic Godet
  
  Varian Semiconductor Equipment Associates, VSEA
- Timothy Miller
  
  Varian Semiconductor Equipment Associates
- Nicholas Chamberlain
  
  Varian Semiconductor Equipment Associates
- George Papasouliotis
  
  Varian Semiconductor Equipment Associates
View abstract →
Effect of electron beam on Propagation of Dust Ion Acoustic waves

POSTER
Authors
- Amir Mohammad Ahadi
  
  Physics Department,Faculty of Science, Shahid Chamran University of Ahvaz, Ahvaz-Iran
- Samad Sobhanian
  
  Physics Faculty,Tabriz University, Tabriz-Iran
View abstract →
Modeling of Hydrogen Negative Ions in Sheet Plasma

POSTER
Authors
- Hiroyasu Komukai
  
  Tokai Universtiy
- Akira Tonegawa
  
  Tokai Universtiy, Tokai University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Ill-posed problems in low temperature plasmas

POSTER
Authors
- Raoul Franklin
  
  The Open University
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Diffusion-ionization plasma propagation and pattern formation during microwave breakdown

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Authors
- Guo-Qiang Zhu
  
  LAPLACE (LAboratoire PLAsma et Conversion d Energie), CNRS and Universite de Toulouse, France
- Bhaskar Chaudhury
  
  LAPLACE (LAboratoire PLAsma et Conversion d Energie), CNRS and Universite de Toulouse, France
- Jean-Pierre Boeuf
  
  LAPLACE, CNRS and Universite Paul Sabatier, Toulouse, France, LAPLACE (LAboratoire PLAsma et Conversion d Energie), CNRS and Universite de Toulouse, France, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universit\'e de Toulouse, France
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Study of the nonresonant Buneman instability throughout the negative diffusion equation

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Authors
- Mohammad Mohsen Hatami
  
  Beheshti University, G. C., Laser-Plasma Research Institute, Evin, Tehran, Iran
- Babak Shokri
  
  Shahid Beheshti University, G. C., Phys. Dept. and Laser-Plasma Research Inst., Evin, Tehran, Iran
- Ali Reza Niknam
  
  Beheshti University, G. C., Laser-Plasma Research Institute, Evin, Tehran, Iran
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Influence of Dissipation on Weak Beam-Plasma Interaction

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Authors
- Eduard Rostomyan
  
  Institute of Radiophysucs and Electronics Armenian National Ac. Sci.
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Development of a compact, versatile electron beam source

POSTER
Authors
- Scott Walton
  
  Naval Research Laboratory
- David Boris
  
  Naval Research Laboratory
- Christopher Compton
  
  Naval Research Laboratory
- Christopher Cothran
  
  Naval Research Laboratory
- Richard Fernsler
  
  Plasma Physics Division, Naval Research Laboratory, Naval Research Laboratory
- William Amatucci
  
  Naval Research Laboratory
- Robert Meger
  
  Naval Research Laboratory
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Dynamics of ion beam current compensation by RF pulsed electron flow emitted from the single-grid ICP source

POSTER
Authors
- Dmytro Rafalskyi
  
  V.N. Karazin Kharkiv National University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Plasma transport across magnetic field lines in the linear machine Mistral

POSTER
Authors
- Alexandre Escarguel
  
  PIIM Laboratory
- Cyril Rebond
  
  PIIM Laboratory
- Nicolas Claire
  
  University of Provence, PIIM Laboratory
- Tony Lefevre
  
  PIIM Laboratory
- Fabrice Doveil
  
  CNRS, PIIM Laboratory
View abstract →
NON-EQUILIBRIUM KINETICS

View abstract →
Influence of the oxygen feed position on the compositions and isotopic contents of reaction products in N$_{2}$ glow discharge

ORAL
Authors
- Shinsuke Mori
  
  Tokyo Institute of Technology
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Kinetic processes in complex thermally non-equilibrium plasma produced by shock wave

ORAL
Authors
- Alexander Starik
  
  Central Institute of Aviation Motors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- Nataliya Titova
  
  Central Institute of Aviation Motors
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N2(B,v'=0-12) populations in Ar-N2 and N2 flowing afterglows of microwave and Corona discharges

ORAL
Authors
- Andre Ricard
  
  Universit\'e Toulouse
- Freddy Gaboriau
  
  Universit\'e Toulouse
- Anne-Marie Pointu
  
  University Paris Sud-Orsay
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Kinetic of propane in homogeneous high pressure low temperature plasmas of atmospheric gases

POSTER
Authors
- S. Pasquiers
  
  LPGP-CNRS-UPS, LPGP-CNRS-UPS, Orsay, France
- N. Moreau
  
  LPGP-CNRS-UPS, Orsay, France
- N. Moreau
  
  LPGP-CNRS-UPS, Orsay, France
- L. Magne
  
  LPGP, CNRS-UPS, Orsay, France, LPGP-CNRS-UPS, LPGP-CNRS-UPS, Orsay, France
- P. Jeanney
  
  LPGP, CNRS-UPS, Orsay, France, LPGP-CNRS-UPS, LPGP-CNRS-UPS, Orsay, France
- F. Jorand
  
  LPGP-CNRS-UPS, LPGP-CNRS-UPS, Orsay, France
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Anomalous Doppler Broadening of Hydrogen Lines Caused by Exotermic Reactions

POSTER
Authors
- Jayr Amorim
  
  Laborat\'orio Nacional de Ci\^encia e Tecnologia do Bioetanol-CTBE, Caixa Postal 6170. CEP 13083-970, Campinas, SP, Brazil
- Jorge Loureiro
  
  Instituto de Plasmas e Fus\~ao Nuclear - Laboratorio Associado, Instituto Superior Tecnico, 1049-001 Lisboa, Portugal, Instituto de Plasmas e Fusao Nuclear, Instituto Superior Tecnico, 1049-001, Lisboa, Portugal
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Electron Velocity Distribution Function in Beam Plasmas

POSTER
Authors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Vacuum UV emission spectroscopy of discharge excited by a RF helical coupling device in N$_{2}$-Ar mixtures

POSTER
Authors
- Pavel Veis
  
  DEP
- Corinne Foissac
  
  IEMN
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Mechanism of fast gas heating in a non-equilibrium weakly ionized air discharge plasma at high electric fields

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  Moscow Institute of Physics and Technology
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  Moscow Institute of Physics and Technology
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  Moscow Institute of Physics and Technology
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  NEQLab Research BV, the Hague, The Netherlands, Drexel Plasma Institute, Drexel University, Philadelphia, PA, Drexel University, Philadelphia, PA 19104, Drexel University
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  LPGP-CNRS-UPS, LPGP-CNRS-UPS, Orsay, France
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  LPGP-CNRS-UPS, LPGP-CNRS-UPS, Orsay, France
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  LPGP, CNRS-UPS, Orsay, France, LPGP-CNRS-UPS, LPGP-CNRS-UPS, Orsay, France
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  LPGP-CNRS-UPS, LPGP-CNRS-UPS, Orsay, France
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  LPGP-CNRS-UPS
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  LPGP-CNRS-UPS, LPGP-CNRS-UPS, Orsay, France
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  LPGP, CNRS-UPS, Orsay, France, LPGP-CNRS-UPS, LPGP-CNRS-UPS, Orsay, France
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  LPGP, CNRS-UPS, Orsay, France, LPGP-CNRS-UPS, LPGP-CNRS-UPS, Orsay, France
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  LPGP-CNRS-UPS, LPGP-CNRS-UPS, Orsay, France
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  LPGP-CNRS-UPS, LPGP-CNRS-UPS, Orsay, France
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  Nagoya University
- Kazuaki Kurihara
  
  Toshiba Corporation
- Koichi Sasaki
  
  Hokkaido University
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  Charles University, Faculty of Mathematics and Physics, Prague
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  Charles University, Faculty of Mathematics and Physics, Prague
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  Department of Physics University of Trento Italy
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  Department of Physics University of Trento Italy
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  Department of Physics University of Trento, Department of Physics University of Trento Italy
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  Department of Physics University of Trento, Department of Physics University of Trento Italy
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  Kyrgyz-Russian Slavic University
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  2Institute of Electron Physics of NAS Ukraine
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  LIMHP-CNRS UPR 1311
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  LIMHP-CNRS UPR 1311
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  LIMHP-CNRS UPR 1311
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  LIMHP-CNRS UPR 1311
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  Nagoya University
- Kenji Ishikawa
  
  Nagoya Univ., Nagoya University, Plasma Nanotechnology Research center, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
- Makoto Sekine
  
  Nagoya University, Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603
- Masaru Hori
  
  Nagoya University, Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya Univ., Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603
- A. Kono
  
  Nagoya University
- K. Suu
  
  ULVAC Inc.
View abstract →
Gaseous Chemistry induced by a CCP RF discharge in a N2 CH4 mixture

POSTER
Authors
- Nathalie Carrasco
  
  LATMOS/CNRS, LATMOS, Universite de Versailles St Quentin
- Thomas Gautier
  
  LATMOS, Universite de Versailles St Quentin
- Arnaud Buch
  
  LGPM, Ecole Centrale Paris
- Ella Sciamma-O'Brien
  
  LATMOS/CNRS, LATMOS, Universite de Versailles St Quentin
- Cyril Szopa
  
  LATMOS, Universite de Versailles St Quentin
- Guy Cernogora
  
  LATMOS/CNRS, LATMOS, Universite de Versailles St Quentin
View abstract →
Kinetics of pulsed DC discharge in N$_{2}$/O$_{2}$/N$_{x}$O$_{y}$ mixtures studied by quantum cascade laser absorption spectroscopy

POSTER
Authors
- Daniil Marinov
  
  LPP, Ecole Polytechnique, UPMC, Universite Paris Sud-11, CNRS, Palaiseau, France
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
A State-to-State Model for High-Temperature N$_{2}$-CH$_{4}$ Plasmas

POSTER
Authors
- Dzmitry Tsyhanou
  
  Instituto de Plasmas e Fus\~ao Nuclear - Laboratorio Associado, Instituto Superior Tecnico, 1049-001 Lisboa, Portugal
- M\'ario Lino da Silva
  
  Instituto de Plasmas e Fus\~ao Nuclear - Laboratorio Associado, Instituto Superior Tecnico, 1049-001 Lisboa, Portugal
- Vasco Guerra
  
  IPFN-LA, Instituto Superior Tecnico, 1049-001 Lisboa, Portugal, Instituto de Plasmas e Fusao Nuclear - Laboratorio Associado, Instituto Superior Tecnico, 1049-001 Lisboa, Portugal, Instituto de Plasmas e Fus\~ao Nuclear - Laboratorio Associado, Instituto Superior Tecnico, 1049-001 Lisboa, Portugal, IPFN - Laboratorio Associado, IST, Lisboa, Portugal
- Jorge Loureiro
  
  Instituto de Plasmas e Fus\~ao Nuclear - Laboratorio Associado, Instituto Superior Tecnico, 1049-001 Lisboa, Portugal, Instituto de Plasmas e Fusao Nuclear, Instituto Superior Tecnico, 1049-001, Lisboa, Portugal
View abstract →
SHEATHS

View abstract →
Temporal Sheath Profiling

ORAL
Authors
- Michael Barnes
  
  MS Barnes Engineering
- Walter Gekelman
  
  UCLA Dept of Physics, UCLA Physics Department
- Patrick Pribyl
  
  UCLA Dept of Physics, UCLA Physics Department
- Brett Jacobs
  
  Applied Materials, Inc.
View abstract →
On the study of ion mass in the collisionless magnetized plasma sheath

POSTER
Authors
- Hossein Goudarzi
  
  Laser and Plasma Research Inst.
- Alireza Niknam
  
  Laser and Plasma Research Inst., Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran
- Hamid Ghomi
  
  Laser and Plasma Research Inst.
View abstract →
Ion Temperature Effects on the Sheath Structure in the Magnetized Electronegative Plasma

POSTER
Authors
- Mansour Khoramabadi
  
  Islamic Azad University, Boroujerd Branch
- Hamid Ghomi
  
  Laser and Plasma Research Institute, Shahid Beheshti University, Evin1983963113, Tehran, Iran, Laser and Plasma Research Inst.
View abstract →
Laser-induced fluorescence measurements deformation of neutrals distribution function in the vicinity of a surface

POSTER
Authors
- Nicolas Claire
  
  University of Provence, PIIM Laboratory
- St\'ephane Mazouffre
  
  ICARE-CNRS, ICARE CNRS Orleans, France
- Cyril Rebont
  
  University of Provence
- Fabrice Doveil
  
  CNRS, PIIM Laboratory
View abstract →
Kinetic approach to the nonlinearity of RF modulated sheath

POSTER
Authors
- M. Shihab
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Control of ion bombardment energies in low-temperature plasmas

POSTER
Authors
- Tim Baloniak
  
  University of Bochum, Germany, Workgroup Reactive Plasmas, Ruhr-University Bochum
- R\"{u}diger Reuter
  
  University of Bochum, Germany
- Achim von Keudell
  
  University of Bochum, Germany
View abstract →
Collisional sheaths and resulting ion energy distributions at rf biased electrodes

POSTER
Authors
- X. Victor Qin
  
  University of Wisconsin-Madison
- A.E. Wendt
  
  University of Wisconsin-Madison
View abstract →
MODELING AND SIMULATION II

View abstract →
A global model of a micro atmospheric pressure plasma jet

POSTER
Authors
- Alexander Wollny
  
  Ruhr-University Bochum
- Torben Hemke
  
  Ruhr-University Bochum
- Dennis Ziegler
  
  Ruhr-University Bochum
- Ralf Peter Brinkmann
  
  Ruhr University Bochum, Department of Electrical Engineering and Information Sciences, Ruhr-University Bochum, Germany, Theoretical Electrical Engineering, Ruhr-University Bochum, Ruhr-University Bochum, Ruhr-Universitaet Bochum
- Thomas Mussenbrock
  
  Ruhr University Bochum, Ruhr-University Bochum
View abstract →
Dependence of ozone generation on the surface condition of dielectrics

POSTER
Authors
- Go Takahashi
  
  Department of Applied Physics, National Defense Academy, Japan
View abstract →
Simulation of Nanosecond Repetitively Pulsed Discharges in Air for Plasma Assisted Combustion

ORAL
Authors
- Fabien Tholin
- Zdenek Bonaventura
  
  Lab. EM2C, UPR 288 CNRS - Ecole Centrale Paris, 92295 Ch\^atenay-Malabry Cedex
- Jaroslav Jansky
- Anne Bourdon
View abstract →
Modeling the sheath in a radio frequency driven micro-plasmajet at atmospheric pressure

POSTER
Authors
- Torben Hemke
  
  Theoretical Electrical Engineering, Ruhr-University Bochum
- Ralf Peter Brinkmann
  
  Ruhr University Bochum, Department of Electrical Engineering and Information Sciences, Ruhr-University Bochum, Germany, Theoretical Electrical Engineering, Ruhr-University Bochum, Ruhr-University Bochum, Ruhr-Universitaet Bochum
- Thomas Mussenbrock
  
  Department of Electrical Engineering and Information Sciences, Ruhr-University Bochum, Germany, Theoretical Electrical Engineering, Ruhr-University Bochum
View abstract →
Determination of Reduced Electric Field in Streamer Discharges in Air at Atmospheric Pressure from Space and Time Integrated Optical Emissions of Excited Nitrogen Molecules and Their Ions

POSTER
Authors
- Anne Bourdon
  
  CNRS-Ecole Centrale, Paris, Lab. EM2C, UPR 288 CNRS - Ecole Centrale Paris, 92295 Ch\^atenay-Malabry Cedex
- Zdenek Bonaventura
  
  Lab. EM2C, UPR 288 CNRS - Ecole Centrale Paris, 92295 Ch\^atenay-Malabry Cedex
- Sebastien Celestin
  
  Penn State University, 227 EE East, University Park, PA, 16801, USA
- Victor Pasko
  
  Penn State University, 227 EE East, University Park, PA, 16801, USA
View abstract →
Modeling of Argon Plasma Afterglow With Large Dust Density

POSTER
Authors
- Ilija Stefanovic
  
  Ruhr-Universitaet, Bochum, Germany, Ruhr-Universit\"at Bochum, Germany, Inst. of Exp. Physics II, Ruhr-Univ. Bochum, Bochum, Germany
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- Brankica Sikimic
  
  Ruhr-Universitaet, Bochum, Germany, Ruhr-Universit\"at Bochum, Germany
- Joerg Winter
  
  Ruhr-Universitaet, Bochum, Germany, Ruhr-Universit\"at Bochum, Germany, Institute for Experimental Physics II: Applied Plasma Physics, Ruhr-Universit\"at Bochum, 44780 Bochum, Germany, Ruhr-University Bochum, Institute for Experimental Physics II, Germany, Inst. of Exp. Physics II, Ruhr-Univ. Bochum, Bochum, Germany
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Modeling of electron transport parameters in methane and air mixture gas

POSTER
Authors
- Haruaki Akashi
  
  National Defense Academy
- Koichi Sasaki
  
  Hokkaido University
View abstract →
Kinetic theory approach of the wave instabilities of collisionless plasma

ORAL
Authors
- Sanaz E. Namini
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Numerical investigation of fs pulsed laser interaction with an underdense plasma

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  Department of Physics, Iran University of Science and Technology (IUST), Narmak, Tehran, 16846-13114, Iran
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  Department of Physics, Iran University of Science and Technology (IUST), Narmak, Tehran, 16846-13114, Iran
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  LAPLACE, CNRS and University of Toulouse, France, LAPLACE-CNRS
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  NEQLab Research BV, Delft Univercity of Technology, NEQLab Research BV, The Netherlands
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  Centrum Wiskunde \& Informatica
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  Eindhoven University of Technology
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  Centre for Mathematics and Computer Science (CWI), P.O.Box 94079, 1090 GB Amsterdam, The Netherlands, Centrum Wiskunde \& Informatica
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  Universidade da Madeira
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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A Functional Analytic Description of the Multipole Resonance Probe

ORAL
Authors
- Jens Oberrath
  
  Theoretical Electrical Engineering, Ruhr University Bochum
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Highlighting of the discharge instabilities in high-pressure plasmas for excimer lasers

ORAL
Authors
- Zahir Harrache
  
  Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain)
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
A New Simulation Approach to Control Plasma Uniformities

ORAL
Authors
- Akihiro Tsuji
  
  Department of Electrical and Electronic Engineering, Graduate School of Engineering, Kobe University
- Yasuyoshi Yasaka
  
  Department of Electrical and Electronic Engineering, Graduate School of Engineering, Kobe University
View abstract →
Model for the investigation of chemical non-equilibrium in a silicon purification process by thermal plasma with validation by spectroscopic measurements

ORAL
Authors
- Mickael Majchrzak
  
  EPM-SIMAP-CNRS
- Jochen Altenberend
  
  EPM-SIMAP-CNRS
- Yves Delannoy
  
  EPM-SIMAP-CNRS
- Guy Chichignoud
  
  EPM-SIMAP-CNRS
View abstract →
Numerical modeling of distribution of conducting and nonconducting matter in the discharge channel upon electrical wire explosion

ORAL
Authors
- Svetlana Tkachenko
  
  Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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DIAGNOSTICS

View abstract →
Development of a Collective Thomson Scattering System for Diagnostics of Laser Produced EUV Plasmas

ORAL
Authors
- Kentaro Tomita
  
  Kyushu University
- Kota Ohara
  
  Kyushu University
- Kazuki Nakayama
  
  Kyushu University
- Kiichiro Uchino
  
  Kyushu University
View abstract →
Diode laser atomic absorption and laser Induced fluorescence of Argon in a TCP plasma used for thin film sputter deposition

ORAL
Authors
- Titaina Gibert
  
  Orl\'eans University, GREMI
- Christine Charles
  
  ANU
- Amael Caillard
  
  GREMI
- Pascal Brault
  
  GREMI
- Martin Cormier
  
  GREMI
View abstract →
Application of a Fizeau Interferometer to Fast High Resolution Measurements of the Spectral Line Shapes of Plasma Species

POSTER
Authors
- Ian Falconer
  
  School of Physics, University of Sydney
- Ondrej Nov\'ak
  
  Department of Physics, University of West Bohemia
- Roberto Sangin\'es
  
  School of Physics, University of Sydney
- David McKenzie
  
  School of Physics, University of Sydney
- Marcela Bilek
  
  School of Physics, University of Sydney
View abstract →
Real-Time Endpoint Detection for SiO$_{2}$ Film Plasma Etching Using Impedance Analysis with Modified Principal Component Analysis

POSTER
Authors
- Haegyu Jang
  
  SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- Heeyeop Chae
  
  Department of Chemical Engineering, Sungkyunkwan University
View abstract →
Characterization of Nanosecond Repetitively Pulsed Discharges by Infra-Red Laser Absorption Spectroscopy

POSTER
Authors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
In-Situ Monitoring of Film Thickness and Chamber Condition of Dielectric PECVD Process with Impedance Analysis

POSTER
Authors
- Daekyoung Kim
  
  SKKU Advanced Institute of Nano Technology, Sungkyunkwan University, Korea
- Haegyu Jang
  
  SKKU Advanced Institute of Nano Technology, Sungkyunkwan University
- Heeyeop Chae
  
  Department of Chemical Engineering, Sungkyunkwan University
View abstract →
Plasma parameter measurements of Ar+H2+C7H8 plasmas in H-assisted plasma CVD reactor

POSTER
Authors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Measurement of multiphoton ionization efficiency for reliable laser Thomson scattering diagnostics

POSTER
Authors
- Yukitaka Matsuda
  
  Nagoya University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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On the Perturbation of Plasma by Emissive Probes

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Authors
- Codrina Ionita
  
  University of Innsbruck, Austria
- Milan Cercek
  
  Jozef Stefan Institute, Ljubljana, Slovenia
- Boris Fonda
  
  Jozef Stefan Institute, Ljubljana, Slovenia
- Tomaz Gyergyek
  
  University of Ljubljana, Slovenia
- Gregor Filipic
  
  Jozef Stefan Institute, Ljubljana, Slovenia
- Jernej Kovacic
  
  University of Ljubljana, Slovenia
- Roman Schrittwieser
  
  University of Innsbruck, Austria
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Electron density measurements in technological plasmas using the Multipole Resonance Probe

POSTER
Authors
- T. Styrnoll
  
  Department of Electrical Engineering and Information Sciences, Ruhr-University Bochum, Germany
- M. Lapke
  
  Department of Electrical Engineering and Information Sciences, Ruhr-University Bochum, Germany
- C. Schulz
  
  Department of Electrical Engineering and Information Sciences, Ruhr-University Bochum, Germany
- R. Storch
  
  Department of Electrical Engineering and Information Sciences, Ruhr-University Bochum, Germany
- J. Oberath
  
  Department of Electrical Engineering and Information Sciences, Ruhr-University Bochum, Germany
- T. Musch
  
  Department of Electrical Engineering and Information Sciences, Ruhr-University Bochum, Germany
- I. Rolfes
  
  Department of Electrical Engineering and Information Sciences, Ruhr-University Bochum, Germany
- P. Awakowicz
  
  Department of Electrical Engineering and Information Sciences, Ruhr-University Bochum, Germany, Electrical Engineering and Plasma Technology (AEPT), Ruhr-University Bochum, Germany, Institute for Plasma Technology, Ruhr University Bochum, Germany, Ruhr-University Bochum, GER
- Thomas Mussenbrock
  
  Department of Electrical Engineering and Information Sciences, Ruhr-University Bochum, Germany, Theoretical Electrical Engineering, Ruhr-University Bochum
- Ralf Peter Brinkmann
  
  Ruhr University Bochum, Department of Electrical Engineering and Information Sciences, Ruhr-University Bochum, Germany, Theoretical Electrical Engineering, Ruhr-University Bochum, Ruhr-University Bochum, Ruhr-Universitaet Bochum
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Diagnostics of Pulsed Powered Microplasma Discharge in N$_{2}$ by Emission Spectroscopy

POSTER
Authors
- Marius Blajan
  
  Shizuoka University, Innovation and Joint Research Center
- Kazuo Shimizu
  
  Shizuoka University, Innovation and Joint Research Center
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Investigations on metastable helium atoms in a capacitively coupled plasma in a mixture of He, Ar and CF4

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Authors
- Wen-Chao Zhu
  
  Tsinghua University
- Dirk Luggenh\"olscher
  
  Ruhr-University Bochum
- Wen-Chao Zhu
  
  Tsinghua University
- Wen-Chao Zhu
  
  Tsinghua University
- Wen-Chao Zhu
  
  Tsinghua University
- Xi-Ming Zhu
  
  Tsinghua University
- Wen-Chao Zhu
  
  Tsinghua University
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Interferometry phase and amplitude shift fields deep processing for femtosecond laser ablation plasma plume characterization

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Authors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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  Hanyang University
- Hyo-Chang Lee
  
  Hanyang University
- Chin-Wook Chung
  
  Hanyang University, Hanyang Univ. Seoul, South Korea, Department of Electrical Engineering, Hanyang University,17 Heangdang-dong, Seongdong-ku, Seoul 133-791, Republic of Korea, Hanyang University, Seoul, South Korea, HanYang University
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  Dublin City University
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  Dublin City University
- Stephen Daniels
  
  Dublin City University, NCPST and School of Electronic Engineering, DCU, NCPST, DCU
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  Impedans Ltd
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  Hanyang University, Seoul, South Korea
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  Hanyang University, Seoul, South Korea
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  Hanyang University, Hanyang Univ. Seoul, South Korea, Department of Electrical Engineering, Hanyang University,17 Heangdang-dong, Seongdong-ku, Seoul 133-791, Republic of Korea, Hanyang University, Seoul, South Korea, HanYang University
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On the possibility of measuring the optical spectrum of light sources by means of a rotating mirror

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  INFIP, CONICET-UBA, Argentina
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  UNMDP, Mar del Plata, Argentina
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  University of Texas at Dallas
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  UT Dallas, UTD, University of Texas at Dallas
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  UT Dallas, UTD, University of Texas at Dallas
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  Air Force Research Laboratory
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  UES, Inc.
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  University of Houston, Universite de Montreal
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  University of Houston, Universite de Montreal
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Experimental results of two dimensional spatial distribution of plasma parameters in CVD processing plasma

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  Department of Electrical Engineering, Hanyang University,17 Heangdang-dong, Seongdong-ku, Seoul 133-791, Republic of Korea
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  Hanyang Univ. Seoul, South Korea, Hanyang University, Department of Electrical Engineering, Hanyang University,17 Heangdang-dong, Seongdong-ku, Seoul 133-791, Republic of Korea
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  Hanyang University, Hanyang Univ. Seoul, South Korea, Department of Electrical Engineering, Hanyang University,17 Heangdang-dong, Seongdong-ku, Seoul 133-791, Republic of Korea, Hanyang University, Seoul, South Korea, HanYang University
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\textit{In situ} feedback control of ion flux by using a floating harmonic method in processing plasmas

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Authors
- Yu-Sin Kim
  
  Hanyang Univ. Seoul, South Korea, Hanyang University, Department of Electrical Engineering, Hanyang University,17 Heangdang-dong, Seongdong-ku, Seoul 133-791, Republic of Korea
- Se-Jin Oh
  
  Hanyang University, HanYang University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- Chin-Wook Chung
  
  Hanyang University, Hanyang Univ. Seoul, South Korea, Department of Electrical Engineering, Hanyang University,17 Heangdang-dong, Seongdong-ku, Seoul 133-791, Republic of Korea, Hanyang University, Seoul, South Korea, HanYang University
View abstract →
Analysis of current harmonics and application on the floating harmonics method with multiple voltage waveforms in a plasma

POSTER
Authors
- Young-Do Kim
  
  Hanyang Univ. Seoul, South Korea
- Yu-Sin Kim
  
  Hanyang Univ. Seoul, South Korea, Hanyang University, Department of Electrical Engineering, Hanyang University,17 Heangdang-dong, Seongdong-ku, Seoul 133-791, Republic of Korea
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- Chin-Wook Chung
  
  Hanyang University, Hanyang Univ. Seoul, South Korea, Department of Electrical Engineering, Hanyang University,17 Heangdang-dong, Seongdong-ku, Seoul 133-791, Republic of Korea, Hanyang University, Seoul, South Korea, HanYang University
View abstract →
Analyses of electron and negative atomic oxygen ion density by means of 160 GHz microwave interferometry and laser photodetachment in oxygen cc-rf plasma

POSTER
Authors
- Christian K\"ullig
  
  University of Greifswald, Institute of Physics, Greifswald, Germany
- Kristian Dittmann
  
  University of Greifswald, Institute of Physics, Greifswald, Germany
- J\"urgen Meichsner
  
  University of Greifswald, Institute of Physics, Greifswald, Germany
View abstract →
HIGH PRESSURE PLASMA II

View abstract →
Shadowgraph Visualizations of Pulsed Discharge Phenomena in Pressurized Carbon Dioxide up to Supercritical Conditions

POSTER
Authors
- Tsuyoshi Kiyan
  
  Kumamoto University
- Takeshi Ihara
  
  Kumamoto University
- Sunao Katsuki
  
  Kumamoto University, Priority Organization for Innovation and Excellence, Kumamoto University, 2-39-1, Kurokami, Kumamoto 860-8555, Japan
- Takashi Sakugawa
  
  Kumamoto University
- Masanori Hara
  
  Kumamoto University
- Hidenori Akiyama
  
  Kumamoto University, Graduate school of Science and Technology, Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555, Japan
View abstract →
Understanding halo and sprite discharges above thunderclouds

ORAL
Authors
- Ute Ebert
  
  CWI Amsterdam
- Alejandro Luque
  
  IAA-CSIC, Spain
View abstract →
Novel Electrode Configuration for Ionic Wind Generation in Air at Atmospheric Pressure

ORAL
Authors
- Antoine Ferret
  
  Ecole Centrale Paris
- David Z. Pai
  
  Ecole Centrale Paris
- Dorian Colas
  
  Ecole Centrale Paris
- Ignazio Sciacca
  
  Ecole Centrale Paris
- Deanna A. Lacoste
  
  Ecole Centrale, Paris, France, Ecole Centrale Paris
- Christophe O. Laux
  
  Ecole Centrale, Paris, France, Ecole Centrale Paris
View abstract →
Flow Separation Control on Airfoil With Pulsed Nanosecond Discharge Actuator

ORAL
Authors
- Ilia Popov
  
  NEQLab Research BV, Delft Univercity of Technology, NEQLab Research BV, The Netherlands
- Giuseppe Correale
  
  NEQLab Research BV, Delft Univercity of Technology
- Aleksandr Rakitin
  
  NEQLab Research BV
- Andrey Starikovskiy
  
  NEQLab Research BV, the Hague, The Netherlands, Drexel Plasma Institute, Drexel University, Philadelphia, PA, Drexel University, Philadelphia, PA 19104, Drexel University
- Leo Veldhuis
  
  Delft University of Technology, Delft, The Netherlands
- Steven Hulshoff
  
  Delft University of Technology, Delft, The Netherlands
View abstract →
The study of the parameters of a streamer corona at high frequency pulses in the gas flow

ORAL
Authors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Flow Control around Cylinder by HF DBD Discharge

ORAL
Authors
- Ivan Moralev
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
The effect of the normal current density and plasma spatial structuring in the DBD in argon

ORAL
Authors
- Ivan Shkurenkov
- Yuri Mankelevich
- Tatyana Rakhimova
View abstract →
Time-resolved Spectral Investigations of Pulsed Atmospheric Dielectric Surface Flashover Discharges

ORAL
Authors
- Klaus Frank
  
  Texas Tech University
- George Laity
  
  Texas Tech University
- Andreas Neuber
  
  Texas Tech University
- Garrett Rogers
  
  Texas Tech University
- Lynn Hatfield
  
  Texas Tech University
- James Dickens
  
  Texas Tech University
- Magne Kristiansen
  
  Texas Tech University
- Andrew Fierro
  
  Texas Tech University
View abstract →
Spatio-temporal post-discharge analysis of nanosecond scale discharges in atmospheric pressure air

ORAL
Authors
- Amath Lo
  
  CORIA Universite et INSA de Rouen
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- Armelle Cessou
  
  CORIA Universite et INSA de Rouen
- Pierre Vervisch
  
  CORIA Universite et INSA de Rouen
View abstract →
Characterization of the Different Regimes of Nanosecond Repetitively Pulsed (NRP) Discharges in Air at Atmospheric Pressure and Ambient Temperature

ORAL
Authors
- Diane Rusterholtz
  
  Laboratoire EM2C CNRS UPR 288 Ecole Centrale Paris
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Non-intrusive Diagnostics of Dielectric Barrier Discharge Plasma Actuator

ORAL
Authors
- Joshua Stults
  
  US Air Force Institute of Technology
- Richard Huffman
  
  US Air Force Institute of Technology
View abstract →
Application of high-voltage pulsed-driving discharge to ignition and detonation initiation

ORAL
Authors
- K. Korytchenko
  
  National Technical University ``KhPI''
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Non Equilibrium Gliding Arc Plasma Reforming of Pyrolysis Gas Fuel

ORAL
Authors
- Fela Odeyemi
  
  Drexel Plasma Institute, Drexel University
- Alexander Rabinovich
  
  Drexel Plasma Institute, Drexel University
- Alexander Fridman
  
  Drexel Plasma Institute, Drexel University
View abstract →
Experimental and simulation study of the OH radical generation in atmospheric pressure microwave plasma

ORAL
Authors
- Margarita Baeva
  
  INP Greifswald e.V., Germany
- Kristian Rackow
  
  INP Greifswald e.V., Germany
- J\"{o}rg Ehlbeck
  
  INP Greifswald e.V., Germany
View abstract →
Periodic pulse discharge self-focusing and streamer-to-spark transition in under-critical electric field

ORAL
Authors
- Andrey Starikovskiy
  
  NEQLab Research BV, the Hague, The Netherlands, Drexel Plasma Institute, Drexel University, Philadelphia, PA, Drexel University, Philadelphia, PA 19104, Drexel University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Shedding light on arc cathode spots

ORAL
Authors
- Ian Falconer
  
  School of Physics, University of Sydney
- Roberto Sangin\'es
  
  School of Physics, University of Sydney
- Ondrej Nov\'ak
  
  Department of Physics, University of West Bohemia
- Adam Israel
  
  School of Physics, University of Sydney
- David McKenzie
  
  School of Physics, University of Sydney
- Marcela Bilek
  
  School of Physics, University of Sydney
View abstract →
Non-equilibrium simulation of the spatial and temporal behaviour of a magnetically rotating arc in argon

ORAL
Authors
- Margarita Baeva
  
  INP Greifswald e.V., Germany
- Dirk Uhrlandt
  
  INP Greifswald e.V., Germany
- Detlef Loffhagen
  
  INP Greifswald e.V., Germany
View abstract →
Density and translational temperature of Pb atom in the multi-Micro Hollow Cathode Lamp measured by diode laser absorption spectroscopy

ORAL
Authors
- Mari Inoue
  
  Wakayama University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Propagation dynamics of a room-temperature pulsed argon plasma plume through a simple dispersion-grating diagnostic method

ORAL
Authors
- Qing Xiong
- Anton Nikiforov
- Xinpei Lu
- Christophe Leys
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Destruction of volatile organic compounds under atmospheric conditions by usage of a multi stage packed bed reactor

ORAL
Authors
- Juergen Roepcke
  
  INP-Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, INP Greifswald, Germany
- M. Huebner
  
  INP-Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany
- Olivier Guaitella
  
  LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud-11, CNRS, Palaiseau, France
- Antoine Rousseau
  
  Ecole Polytechnique, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud-11, CNRS, Palaiseau, France, Laboratoire de Physique des Plasmas, LPP, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France
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The influence of confining walls on 2D electron dynamics in radio frequency driven atmospheric pressure plasmas

ORAL
Authors
- Colm O'Neill
  
  Centre for Plasma Physics, Queens University Belfast, Belfast, BT7 1NN, Northern Ireland, UK, Centre for Plasma Physics, Queens University Belfast, BT7 1NN Belfast, Northern Ireland, UK
- Jochen Waskoenig
  
  Centre for Plasma Physics, Queens University Belfast, BT7 1NN Belfast, Northern Ireland, UK
- Timo Gans
  
  Queen's University Belfast, UK, Queen's University Belfast, Centre for Plasma Physics, Queens University Belfast, Belfast, BT7 1NN, Northern Ireland, UK, Centre for Plasma Physics, Queens University Belfast, BT7 1NN Belfast, Northern Ireland, UK, CPP, Queens University, Belfast, United Kingdom
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The application of electro-acoustic metrology to atmospheric pressure plasma ablation of gelatine

ORAL
Authors
- Victor Law
  
  Dublin City University
- Niall Durham
  
  Dublin City University
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MICRODISCHARGES

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Space resolved density measurements of argon and helium metastable atoms in radio-frequency generated He-Ar micro-plasmas

POSTER
Authors
- Benedikt Niermann
  
  Ruhr-Universit\"at Bochum, Germany
- Mark Boeke
  
  Ruhr-Universit\"at Bochum, Germany, Ruhr-University Bochum, Institute for Experimental Physics II, Germany, Inst. of Exp. Physics II, Ruhr-Univ. Bochum, Bochum, Germany
- Nader Sadeghi
  
  Universite Grenoble \& CNRS, France, Lab. de Spectr. Physique, Universit\'e J. Fourier \& CNRS, Grenoble, France
- Joerg Winter
  
  Ruhr-Universitaet, Bochum, Germany, Ruhr-Universit\"at Bochum, Germany, Institute for Experimental Physics II: Applied Plasma Physics, Ruhr-Universit\"at Bochum, 44780 Bochum, Germany, Ruhr-University Bochum, Institute for Experimental Physics II, Germany, Inst. of Exp. Physics II, Ruhr-Univ. Bochum, Bochum, Germany
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Driving frequency effects on atmospheric-pressure RF helium microplasmas: plasma density, electron energy and plasma impedance

POSTER
Authors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- Felipe Iza
  
  Loughborough University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Analysis of striations in dielectric barrier microdischarges at atmospheric pressure

POSTER
Authors
- Markus M. Becker
  
  INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Microwave micro-plasma sources based on microstrip-like transmission lines

POSTER
Authors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Sheath and electron density dynamics in a micro hollow cathode discharge in argon

POSTER
Authors
- Claudia Lazzaroni
  
  Laboratoire de Physique des Plasmas, LPP
- Pascal Chabert
  
  Laboratoire de Physique des Plasmas - CNRS, Laboratoire de Physique des Plasmas, LPP, LPP, CNRS - Ecole Polytechnique, Laboratoire de Physique des Plasmas, CNRS-Ecole Polytechnique, Palaiseau, France, LPP - CNRS/Ecole Polytechnique
- Antoine Rousseau
  
  Ecole Polytechnique, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud-11, CNRS, Palaiseau, France, Laboratoire de Physique des Plasmas, LPP, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France
- Nader Sadeghi
  
  LSP
View abstract →
ABSTRACT WITHDRAWN

View abstract →
Removal of carbon based deposits using microplasma jets

POSTER
Authors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Microhollow cathode discharges - ignition and instabilities in diamond arrays

POSTER
Authors
- Sebastien Mitea
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Nanosecond pulsed atmospheric pressure argon microplasmas

POSTER
Authors
- James Walsh
  
  Loughborough University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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Experimental and theoretical studies of the DC breakdown voltage in argon at micrometer separations

POSTER
Authors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- Marija Radmilovic-Radjenovic
  
  Institute of Physics, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Institute of Physics POB 68 11080 Zemun Serbia
- Branislav Radjenovic
  
  Institute of Physics, Institute of Physics, Pregrevica 118, Belgrade, Serbia
View abstract →
Investigations on a thin cathode discharge in argon at atmospheric pressure

POSTER
Authors
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Production and diagnostics of atmospheric-pressure microplasma jet excited by microwave

POSTER
Authors
- Tomohiro Shirasaki
  
  Nagoya University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
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11-GHz Microwave-Excited Microplasma Source for Electrothermal Thruster

POSTER
Authors
- Takeshi Takahashi
  
  Kyoto University
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
- M. Darnon
  
  ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials
View abstract →
Characteristics of cryoplasma below boiling temperature of N$_2$

POSTER
Authors
- Hitoshi Muneoka
  
  Graduate School of Frontier Sciences, The University of Tokyo
- Jai Hyuk Choi
  
  Graduate School of Frontier Sciences, The University of Tokyo
- Kazuo Terashima
  
  Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Graduate School of Frontier Sciences, The University of Tokyo
View abstract →
Optical measurements of reactive oxygen species in atmospheric pressure plasma jets

POSTER
Authors
- J.S. Sousa
  
  LPGP, CNRS-UPS, Orsay, France and IPFN-LA, IST, Lisboa, Portugal
- Vincent Puech
  
  LPGP, CNRS-UPS, Orsay, France, Univ.Paris-Sud \& CNRS
- Qais Algwari
  
  CPP, Queens University, Belfast, United Kingdom, Queen's University Belfast
- L.J. Cox
  
  CPP, Queens University, Belfast, United Kingdom
- K. Niemi
  
  CPP, Queens University, Belfast, United Kingdom
- Timo Gans
  
  Queen's University Belfast, UK, Queen's University Belfast, Centre for Plasma Physics, Queens University Belfast, Belfast, BT7 1NN, Northern Ireland, UK, Centre for Plasma Physics, Queens University Belfast, BT7 1NN Belfast, Northern Ireland, UK, CPP, Queens University, Belfast, United Kingdom
- Deborah O'Connell
  
  Queen's University Belfast, CPP, Queens University, Belfast, United Kingdom
View abstract →
Formation of reactive oxygen species and negative ions in radio-frequency driven He/O$_{2}$ atmospheric pressure plasmas

POSTER
Authors
- Jochen Waskoenig
  
  Centre for Plasma Physics, Queens University Belfast, Belfast, BT7 1NN, Northern Ireland, UK, Centre for Plasma Physics, Queens University Belfast, BT7 1NN Belfast, Northern Ireland, UK
- Timo Gans
  
  Queen's University Belfast, UK, Queen's University Belfast, Centre for Plasma Physics, Queens University Belfast, Belfast, BT7 1NN, Northern Ireland, UK, Centre for Plasma Physics, Queens University Belfast, BT7 1NN Belfast, Northern Ireland, UK, CPP, Queens University, Belfast, United Kingdom
View abstract →
Tailoring electron dynamics through frequency coupling in dual radio-frequency driven atmospheric pressure plasmas

POSTER
Authors
- Colm O'Neill
  
  Centre for Plasma Physics, Queens University Belfast, Belfast, BT7 1NN, Northern Ireland, UK, Centre for Plasma Physics, Queens University Belfast, BT7 1NN Belfast, Northern Ireland, UK
- Jochen Waskoenig
  
  Centre for Plasma Physics, Queens University Belfast, Belfast, BT7 1NN, Northern Ireland, UK, Centre for Plasma Physics, Queens University Belfast, BT7 1NN Belfast, Northern Ireland, UK
- Timo Gans
  
  Queen's University Belfast, UK, Queen's University Belfast, Centre for Plasma Physics, Queens University Belfast, Belfast, BT7 1NN, Northern Ireland, UK, Centre for Plasma Physics, Queens University Belfast, BT7 1NN Belfast, Northern Ireland, UK, CPP, Queens University, Belfast, United Kingdom
View abstract →
Characteristics of DC discharges of high pressure micro gas jet in vacuum

POSTER
Authors
- Yusuke Mizobuchi
  
  Kochi University of Technology
- Akimitsu Hatta
  
  Kochi University of Technology
View abstract →
Simulation of Breakdown in Gas Volumes Inside Dielectrics

POSTER
Authors
- Igor Pashinin
  
  LAPLACE, CNRS and University of Toulouse, France
- Sergey Pancheshnyi
  
  LAPLACE, CNRS and University of Toulouse, France, LAPLACE-CNRS
- Severine Le Roy
  
  LAPLACE, CNRS and University of Toulouse, France
- Leanne C. Pitchford
  
  CNRS-Laplace Toulouse, France, LAPLACE, CNRS and University of Toulouse, France
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