Special Evening Session

Presentations

• Plasma Processing for Nanoelectronics --- History and Prospects

  COFFEE_KLATCH · Invited

  Oct. 5, 2010, 2:00 PM – Oct. 5, 2010, 2:35 PM

  Authors

  • Michael Lieberman

    UC Berkeley

  View abstract →

• Ion Molecule Collision Processes in Gaseous Electronics

  COFFEE_KLATCH · Invited

  Oct. 5, 2010, 2:35 PM – Oct. 5, 2010, 3:00 PM

  Authors

  • Eldon Ferguson

    University of Colorado, Boulder

  View abstract →

• Current Issues for next generation large area and high rate plasma process for thin film deposition

  COFFEE_KLATCH · Invited

  Oct. 5, 2010, 3:00 PM – Oct. 5, 2010, 3:20 PM

  Authors

  • Jeon G. Han

    Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Sungkyunkwan University, Center for Advanced Plasma Surface Technology, Sungkyunkwan University, 300 Chunchun-dong, Jangan-gu, Suwon, 440-746, Republic of Korea

  View abstract →

• Academic Roadmap of Plasma Process Technologies

  COFFEE_KLATCH · Invited

  Oct. 5, 2010, 3:20 PM – Oct. 5, 2010, 3:30 PM

  Authors

  • Masaharu Shiratani

    Kyushu University

  View abstract →

• Discussion

  Oct. 5, 2010, 3:30 PM – Oct. 5, 2010, 4:00 PM

  View abstract →